Optomechanical Device Using Optical Filters for MEMS Array Actuation
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Solution Overview
Problem
Existing MEMS and NEMS arrays face complexity in addressing and reading strategies as their size increases, leading to deteriorated detection performance and increased interconnection density, particularly in three-dimensional configurations.
Innovation Solution
An optomechanical device with a photonic circuit that includes an array of optical filters, each resonating at a specific wavelength, is used to actuate and detect the movement of mechanical elements independently, employing optomechanical coupling in a three-dimensional configuration to address and read each pixel in the array effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If electrical actuation and reading circuits are used for MEMS/NEMS arrays, then the arrays can be controlled and detected, but the device complexity and interconnection density increase significantly as array size grows
Solution Approach 1:
The patent replaces electrical actuation and reading circuits with optical actuation and detection using a photonic circuit. Each optical resonator in the photonic circuit is optically coupled to a corresponding mechanical element, enabling optical control and detection instead of electrical signals. This substitution dramatically reduces interconnection density requirements while maintaining array scalability.
Solution Approach 2:
The patent transitions from planar electrical interconnections to a three-dimensional optical configuration. The photonic circuit is positioned below the mechanical elements array, with optical waves propagating through the substrate to reach the mechanical elements. This spatial reconfiguration enables efficient addressing of multiple elements without increasing lateral interconnection density.
2Area of stationary object
If more MEMS/NEMS elements are added to increase capture or redundancy surface, then detection coverage improves, but the complexity of addressing and reading strategies deteriorates
Solution Approach 1:
The patent segments the optical detection function by assigning dedicated optical resonators to specific groups of mechanical elements. Each optical resonator is optically coupled to a corresponding mechanical element, creating independent optical channels that simplify the addressing strategy. This segmentation allows scalable expansion of the array without proportionally increasing control complexity.
Solution Approach 2:
The photonic circuit acts as an intermediary between the control system and the mechanical elements array. Optical waves serve as the mediating carrier that can be directed to specific mechanical elements through the substrate, enabling distributed addressing without complex electrical interconnection networks. This intermediary approach decouples the control complexity from the array size.
3Quantity of substance
If three-dimensional configurations are used to increase array capacity, then more elements can be integrated, but the reading circuit complexity and detection performance deteriorate
Solution Approach 1:
The patent replaces complex electrical reading circuits with a simplified optical detection system. Optical resonators in the photonic circuit detect mechanical element movements through optomechanical coupling, providing a more reliable detection mechanism that maintains performance as the three-dimensional array size increases. The optical detection approach avoids the noise and interference issues that plague electrical reading circuits in high-density arrays.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient addressing and detection of MEMS or NEMS arrays by using optical filters to encode the position of each mechanical element with a specific wavelength, allowing for independent actuation and detection, thereby improving detection performance and reducing interconnection complexity in large arrays.
Implementation Method 1
an actuating and/or detection device, for actuating the mechanical elements and/or detecting the movement of the mechanical elements or frequency variations of the movement
Implementation Method 2
each optical filter resonating at a particular wavelength
Implementation Method 3
each optical filter resonating at a particular wavelength and being optically coupled to one of the mechanical elements
Data Source
AI summary
An optomechanical device with mechanical elements and optical filters for actuating and/or detecting movement of the elements, including a support, and on the support: an array of mechanical elements anchored to the support and configured to move with respect thereto, and an actuating and/or detection device actuating the elements and/or detecting movement of the elements or frequency variations of the movement. The actuating and/or detection device includes an array of optical filters. Each filter resonates at a particular wavelength and is coupled to one of the elements. The actuating and/or detecting device is positioned in vicinity of all or some of the elements, between the elements and the support. The optical filters are fixed with respect to the support and the mechanical elements and the optical filters are superimposed.