Optomechanical MEMS Multisensor Resonators Without External Modulators
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing MEMS and NEMS sensor systems require external modulators for light beam modulation, leading to complex fabrication and increased system complexity, polarization sensitivity, and high power consumption.
Innovation Solution
A measurement system that integrates optomechanical resonators with both optical and mechanical resonances, where the resonators themselves modulate light beams without external modulators, using dual excitation frequencies to modify optical transmission or reflection based on mechanical vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If external modulators are used for light beam modulation in MEMS/NEMS sensor systems, then light modulation capability is achieved, but device complexity and power consumption increase
Solution Approach 1:
The optical resonator itself performs the modulation function through its mechanical vibrations, eliminating the need for external modulators. The resonator's mechanical element directly modulates the optical beam at its resonance frequency, making the system self-sufficient and reducing overall device complexity while maintaining measurement capability
Solution Approach 2:
The modulation function is merged with the sensing function within the same optical resonator structure. The mechanical element that performs sensing also performs optical modulation, combining multiple functions into a single integrated component rather than using separate external modulators
2Ease of manufacture
If external modulators are used for light beam modulation, then light modulation is achieved, but fabrication complexity increases
Solution Approach 1:
The modulation mechanism is integrated into the optical resonator structure itself, merging the sensing and modulation functions. This eliminates the need for separate external modulator components and their associated fabrication processes, simplifying manufacturing while achieving the required light modulation capability
Solution Approach 2:
The optical resonator structure provides its own modulation capability through mechanical vibrations, making the system self-sufficient. This eliminates the need for external modulator components that would add fabrication complexity, allowing for simpler manufacturing processes
3Use of energy by moving object
If external modulators are used for light beam modulation, then light modulation is achieved, but power consumption increases
Solution Approach 1:
The optical resonator uses its own mechanical vibrations to perform modulation, leveraging the energy already present in the resonant system. This eliminates the need for additional power consumption by external modulators while maintaining high signal quality through the inherent resonance of the optical-cavity
Solution Approach 2:
The modulation is achieved through mechanical vibrations of the resonator itself at its resonance frequency. These vibrations naturally modulate the optical beam without requiring external power-driven modulators, reducing overall power consumption while maintaining effective light modulation for accurate measurements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Simplifies system architecture, reduces complexity, and lowers power consumption by eliminating external modulators while maintaining high signal-to-noise ratio for accurate measurements.
Implementation Method 1
an optical resonator RO... coupled with at least one mechanical element... whose displacement is measured... The displacement x of the beam (parameter u) in the evanescent field of the optical resonator perturbs the effective index
Implementation Method 2
The displacement x of the beam (parameter u) in the evanescent field of the optical resonator perturbs the effective index
Implementation Method 3
The optical resonator is characterized by at least one resonance wavelength λr associated with a resonance bandwidth of width λr/Qopt
Implementation Method 4
the absorption of a biological or other body on the surface of the resonator modifies its effective propagation index
Implementation Method 5
each resonator being configured to exhibit both an optical resonance at an optical resonance wavelength and a mechanical resonance at an associated mechanical resonance frequency
Implementation Method 6
the resonators themselves modulate light beams without external modulators, using dual excitation frequencies to modify optical transmission or reflection based on mechanical vibrations
Implementation Method 7
The beam Fout exits the sensor and is detected by a photodetector, and a measurement of the quantity u is deduced from the detected beam
Data Source
Figure 1~2
Figure 3
Figure 4
AI summary
The invention relates to a measurement system (10) of the MEMS and/or NEMs type comprising: • a resonant assembly (RE) comprising a plurality of N indexed OMRi resonators i, at least one resonant mechanical element MEij coupled to each OMRi resonator, and at least one waveguide (WG) to which the optical resonators are coupled, - an emission device (ED), - an injection device (ID), each OMRi resonator of the resonant assembly being further configured to be excited at a mechanical excitation frequency (fex/o(i)) and to modulate the light beam associated with said first excitation frequency (fex/o(i)), a resonant mechanical element (MEij) being configured to be excited at a mechanical excitation frequency (fex/e(i,j)) and to modify an optical transmission or reflection in the vicinity of the optical resonance of said associated resonator, said modification being a function of a physical quantity (u) to be measured,- at least one detector (Det) - a demodulation device (DDM) comprising a plurality of demodulation modules (11) of the synchronous detection type, called LIA.,