Organic Layer Deposition Apparatus with Segmented Mask Array
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Solution Overview
Problem
The existing deposition methods using fine metal masks (FMMs) are not suitable for manufacturing large-sized organic light-emitting display devices as they tend to distort due to their weight, leading to pattern distortion and are not conducive for high-definition patterning.
Innovation Solution
An organic layer deposition apparatus that includes a deposition source, a deposition source nozzle unit with multiple nozzles, a patterning slit sheet, and an interval measuring unit, allowing for deposition while the substrate and apparatus move relative to each other, with the patterning slit sheet being smaller and separated from the substrate to prevent shadow zones and mask distortion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fine metal mask (FMM) is used for deposition, then patterning can be achieved, but the mask distorts due to its weight leading to pattern distortion
Solution Approach 1:
The patent divides the single large FMM into multiple smaller mask units arranged in an array. Each mask unit is independently supported and can be positioned separately. This segmentation reduces the weight of each individual mask component, preventing distortion while maintaining the ability to create precise patterns through the coordinated arrangement of multiple units.
2Area of stationary object
If a large-sized FMM is used to match large substrates, then coverage is improved, but manufacturing complexity and difficulty increase
Solution Approach 1:
Instead of manufacturing one large FMM to cover the entire substrate, the patent uses multiple smaller mask units that can be independently manufactured. These units are then arranged in an array configuration, making the manufacturing process more feasible and less complex while still providing complete substrate coverage through their collective area.
Solution Approach 2:
The patent transitions from a single-plane large mask to a multi-unit array structure that extends in multiple dimensions. The mask units are arranged spatially in an array and can be positioned at different locations, effectively covering large substrate areas through three-dimensional spatial arrangement rather than relying on a single large two-dimensional mask.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the production of large-sized display devices with improved manufacturing efficiency, reduced defect rates, and easier mask manufacturing, while maintaining deposition uniformity and high-definition patterning capabilities.
Implementation Method 1
a deposition source (110) configured to discharge a deposition material
Implementation Method 2
an interval measuring unit (161) configured to measure an interval between the substrate and the patterning slit sheet
Data Source
AI summary
An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.