Organic Layer Deposition Apparatus Slit Sheet Alignment
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Solution Overview
Problem
The separate deposition method using a fine metal mask (FMM) is not suitable for manufacturing large-sized organic light-emitting display devices, as it faces challenges with mask distortion and alignment issues, particularly with mother glass sizes of 5G or greater, leading to defects and increased manufacturing complexity.
Innovation Solution
An organic layer deposition apparatus that includes a deposition source, a deposition source nozzle unit, and a patterning slit sheet, where the substrate and patterning slit sheet are aligned using camera assemblies and a controller to ensure precise alignment, allowing for continuous deposition while the substrate is moved relative to the apparatus, and the patterning slit sheet is designed to be smaller than the substrate to facilitate easier manufacturing and reduce contact-related defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fine metal mask (FMM) is used for separate deposition of each electrode and intermediate layer, then the organic layer can be formed with desired pattern, but mask distortion and alignment issues occur particularly with mother glass sizes of 5G or greater
Solution Approach 1:
The patent replaces the mechanical FMM system with a slit sheet system that uses optical alignment (camera assemblies) and magnetic field generation (coil units) instead of mechanical mask positioning. This eliminates mask distortion while maintaining patterning capability through the slit sheet structure and coordinated movement with the substrate.
Solution Approach 2:
The patent segments the single FMM into multiple components: a slit sheet with multiple slits corresponding to different patterns, and separate coil units for each electrode/intermediate layer. This segmentation allows independent control and alignment of each layer without the cumulative distortion problems of a single large FMM.
2Manufacturing precision
If FMM is disposed to closely contact substrate for deposition, then organic layer pattern is accurately formed, but contact-related defects increase and manufacturing complexity increases
Solution Approach 1:
The patent introduces a slit sheet as an intermediary between the deposition source and substrate. The slit sheet maintains a spaced relationship from the substrate during deposition, eliminating direct contact defects while still defining the deposition pattern through its slit structure. The spaced configuration allows deposition material to pass through slits without contacting the substrate.
3Ease of manufacture
If separate deposition method is used for each electrode and intermediate layer, then organic light-emitting display device is manufactured, but manufacturing complexity and time increase
Solution Approach 1:
The patent enables continuous deposition by coordinating the movement of the substrate with the slit sheet and deposition source. Multiple layers can be deposited in sequence without stopping the substrate transport, maintaining continuous useful action. The slit sheet remains in spaced relationship throughout, allowing uninterrupted material flow through the slits.
Solution Approach 2:
The patent introduces dynamic movement coordination between the substrate, slit sheet, and deposition source. The relative positions are adjusted during deposition to maintain optimal spaced relationships while enabling continuous manufacturing. This dynamic configuration reduces manufacturing time compared to static FMM methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the production of large-sized organic light-emitting display devices with improved alignment precision, reduced manufacturing complexity, and minimized defects, while allowing for efficient deposition of organic layers on a mass scale.
Implementation Method 1
a deposition source (110) configured to discharge a deposition material
Implementation Method 2
an organic layer deposition apparatus for forming an organic layer on a substrate
Data Source
AI summary
An organic layer deposition apparatus that may be precisely aligned with a substrate during a deposition process. The apparatus includes: a deposition source; a deposition source nozzle unit; and a patterning slit sheet, which is spaced from and smaller than the substrate, and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction. Deposition is performed while the substrate is moved relative to the deposition apparatus in the first direction. The patterning slit sheet includes first and second alignment marks that are spaced from each other. The substrate includes first and second alignment patterns that are spaced from each other. The deposition apparatus also includes first and second camera assemblies for respectively photographing the first alignment mark/pattern and the second alignment mark/pattern. A moving speed of the substrate is synchronized with shooting speeds of the first and second camera assemblies.