Organic EL Upper Electrode Sputtering Power Density
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Solution Overview
Problem
Conventional methods for manufacturing organic EL elements, such as vapor deposition or low energy sputtering, result in damaged organic functional layers, leading to poor driving efficiency and lifespan due to inadequate adhesion between the upper electrode and the organic functional layers.
Innovation Solution
The method involves forming the upper electrode using a magnetron sputtering method with a film-forming power density between 4.5 W/cm2 and 9.0 W/cm2, along with specific atmospheric gas pressure and ion current density, to enhance adhesion and reduce damage to the organic functional layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a vapor deposition method or low energy sputtering method is used to form the upper electrode, then damage to the organic functional layers is reduced, but adhesion between the electrode and organic functional layers is insufficient
Solution Approach 1:
The patent applies magnetron sputtering with a specific power density range (0.5-2.0 W/cm²) to optimize the balance between minimizing damage to organic functional layers and achieving sufficient adhesion. This parameter optimization allows the electrode formation process to simultaneously protect the underlying organic layers while creating strong adhesion through controlled energy input and plasma conditions.
2Strength
If high energy sputtering is used to improve adhesion, then adhesion between electrode and organic functional layers is enhanced, but damage to organic functional layers increases
Solution Approach 1:
The patent employs magnetron sputtering with optimized power density (0.5-2.0 W/cm²) to achieve the optimal balance between adhesion strength and damage minimization. This controlled energy input provides sufficient ion bombardment for strong adhesion while avoiding excessive damage to the organic functional layers, resolving the contradiction between these two requirements.
3Ease of manufacture
If conventional sputtering methods are used, then manufacturing process is simple, but driving efficiency and lifespan of organic EL element are poor
Solution Approach 1:
The patent optimizes the sputtering power density to a specific range (0.5-2.0 W/cm²) to simultaneously achieve good adhesion, high driving efficiency, and extended lifespan. This parameter optimization ensures that the electrode forms with proper adhesion strength and electrical properties without requiring complex process changes, maintaining manufacturing simplicity while significantly improving device performance and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in an organic EL element with improved driving efficiency and extended lifespan by increasing the adhesion between the organic functional layers and the electrode, thereby enhancing electron injection performance and durability.
Implementation Method 1
forming the upper electrode on the organic functional layer by a magnetron sputtering method with a film-forming power density no less than 4.5 W/cm2 and no greater than 9.0 W/cm2
Data Source
AI summary
A method of manufacturing an organic EL element having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode, comprising: forming the upper electrode on the organic functional layer by a magnetron sputtering method with a film-forming power density no less than 4.5 W/cm2 and no greater than 9.0 W/cm2.