Orientation Flat Alignment Using Imaging for Vibration-Deviated Ingots
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Solution Overview
Problem
Existing alignment methods for wafer formation from ingots face challenges in maintaining accurate orientation flat alignment, especially when the ingot undergoes vibrations during transfer, leading to deviations in angle and requiring manual repositioning, which is time-consuming and prone to human error.
Innovation Solution
An alignment method that uses an imaging unit to detect straight-line segments on the orientation flat, calculate off-angles, and adjust the orientation flat to align parallel to the desired direction, employing both straight-line detection and pattern matching at multiple positions to ensure accurate alignment without operator intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If alignment is performed by recording orientation flat as key pattern beforehand and detecting it in captured image, then alignment can be performed automatically, but if ingot is turned by vibrations during transfer, the orientation flat deviates substantially in angle making alignment difficult and requiring manual repositioning
Solution Approach 1:
The system performs preliminary imaging of the orientation flat before alignment processing. By capturing the orientation flat image in advance and using it as a reference for pattern matching during alignment, the system prepares the necessary data beforehand to handle potential deviations caused by vibrations during transfer.
Solution Approach 2:
The system creates a reference copy of the orientation flat image through preliminary imaging. This copied reference image is then used for pattern matching during the alignment process, allowing the system to compare the actual orientation flat position against the reference copy to detect and correct angular deviations automatically.
2Ease of manufacture
If teaching work records the orientation flat as the key pattern, then alignment can be performed, but it takes man-hour and may provoke human mistake
Solution Approach 1:
The system performs self-imaging of the orientation flat without requiring operator intervention for teaching work. The imaging unit automatically captures the orientation flat image, and the control unit automatically processes this image to create the reference pattern, eliminating the need for manual teaching operations and reducing both time consumption and potential human errors.
Solution Approach 2:
The system replaces the manual mechanical teaching operation with an automated imaging and image processing system. Instead of operators manually recording orientation flat positions, the imaging unit captures images and the control unit performs automatic pattern recognition and reference creation, substituting mechanical/manual processes with automated optical and computational processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables efficient and accurate alignment of the orientation flat, even when significant deviations occur, reducing the need for manual repositioning and minimizing human error, thereby improving productivity and reducing alignment time.
Implementation Method 1
imaging the orientation flat by the imaging unit to acquire a captured image
Data Source
AI summary
An alignment method for aligning an orientation flat on a workpiece with a direction parallel to a desired direction includes a straight-line detection step of imaging the orientation flat by an imaging unit and detecting a straight-line segment in the resulting captured image, a first alignment step of calculating an off-angle between an extending direction of the straight-line segment and the desired direction, and, on the basis of the off-angle, positioning the orientation flat such that the extending direction extends parallel to the desired direction, and a second alignment step of imaging the orientation flat at a first position and a second position, which are spaced apart from each other along the desired direction, and positioning the orientation flat such that a line that connects together the orientation flat at the first position and the orientation flat at the second position extends parallel to the desired direction.