Oriented Nanowire Growth on Patterned Substrates

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for growing and harvesting nanowires lack consistency in performance characteristics, hindering the mass production of nanowire-based electronic devices.

Innovation Solution

The method involves depositing nucleating particles on a substrate, heating them to initiate nanowire growth with precursor gas mixtures, allowing for controlled orientation and length of nanowires through temperature and gas composition manipulation, and using sacrificial layers for consistent harvesting.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If current approaches to grow and harvest nanowires are used, then nanowires can be produced, but consistent performance characteristics cannot be achieved

Engineering Contradiction:
Improvenanowire performance consistencyVSAvoidnanowire performance reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies parameter changes by precisely controlling temperature gradients, gas flow rates, and precursor ratios during nanowire growth. By adjusting these parameters systematically, the invention achieves consistent nanowire diameter, length, and crystalline orientation, directly resolving the contradiction between manufacturing precision and reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention employs preliminary action through substrate patterning and nucleation site preparation before nanowire growth. By pre-defining growth locations and conditions, the process ensures consistent nanowire formation across batches, improving both manufacturing precision and performance reliability

Inventive Principle:
Principle #10Preliminary action

2Productivity

If mass production of nanowires is attempted, then production volume increases, but consistency in performance characteristics deteriorates

Engineering Contradiction:
Improvenanowire production volumeVSAvoidnanowire performance consistency
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies segmentation by dividing the substrate into multiple patterned regions with controlled nucleation sites. This allows parallel growth of numerous nanowires while maintaining individual control over each group's growth conditions, enabling mass production without sacrificing consistency

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses universal growth conditions and standardized substrate patterns that can be applied across large substrate areas. This multi-functional approach allows the same process parameters to produce consistent nanowires throughout the entire substrate, scaling productivity while maintaining precision

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of nanowires with consistent performance characteristics, facilitating their use in electronic devices by ensuring controlled growth and efficient harvesting.

Implementation Method 1

heating them to a temperature sufficient to initiate nanowire growth

Methodology Applied
Scientific EffectDecomposition: Pyrolysis

Implementation Method 2

create a liquid alloy droplet

Methodology Applied
Scientific EffectEutectic formation:

Implementation Method 3

contacted with a second precursor gas mixture, whereby nanowires are grown at the site of the alloy droplet

Methodology Applied
Scientific EffectChemical Vapor Deposition: Chemical Vapour Deposition

Implementation Method 4

the Cl atoms allow for growth of the wires in a <100> orientation when grown on a crystallographic substrate as a result of etching of the native oxide layer on the silicon substrate

Methodology Applied
Scientific EffectEtching:

Implementation Method 5

heating them to a first temperature sufficient to initiate nanowire growth

Methodology Applied
Scientific EffectMelting: Melting

Implementation Method 6

form a eutectic phase with the nucleating particles

Methodology Applied
Scientific EffectEutectic phase formation:

Data Source

PatentUS7785922B2Methods for oriented growth of nanowires on patterned substrates
Publication Date: 2010.08.31 ONED MATERIAL INC
  • US7785922B2 patent drawing
  • US7785922B2 patent drawing
  • US7785922B2 patent drawing

AI summary

The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors, as well as us of patterned substrates to grow oriented nanowires. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrificial growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.