Built-In Orifice Valve Structure for Low-Cost Fluid Sealing

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Valve devices used in fluid control systems for semiconductor manufacturing face challenges in incorporating orifices, leading to sealing difficulties and increased manufacturing costs.

Innovation Solution

A valve device design featuring a block-shaped valve body with an accommodation recess containing a valve element, including a primary and secondary flow path, a sealing portion, and a through flow passage with an orifice, allowing for efficient communication between paths while maintaining low manufacturing costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If an orifice plate is inserted into the flow path of a valve device, then an orifice function is achieved, but sealing becomes difficult and manufacturing costs increase

Engineering Contradiction:

Improveorifice functionVSAvoidsealing difficulty and manufacturing cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The orifice function is merged with the valve element itself. The valve element is designed with a through-flow passage that inherently includes the orifice function, eliminating the need for a separate orifice plate. This integration simplifies the structure, ensures proper sealing through the valve element's design, and reduces manufacturing complexity and costs.

Inventive Principle:

Principle #5Merging (Combining)

2Adaptability or versatility

If the valve body is enlarged to accommodate orifices, then orifice function is achieved, but device size increases

Engineering Contradiction:

Improveorifice functionVSAvoidvalve body size

Core Design Contradiction:

Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The orifice function is combined with the valve element rather than requiring separate accommodation space in the valve body. The through-flow passage of the valve element incorporates the orifice functionality, allowing the valve body to maintain its original compact dimensions while still achieving the desired orifice function.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enables the integration of an orifice in the valve device, facilitating low-cost manufacturing and effective fluid control, while maintaining miniaturization and reducing the need for enlarging the valve body.

Implementation Method 1

a diaphragm provided so as to abut to and separate from the seating surface supported by the valve seat support; the diaphragm making the flow passage and the secondary flow path communicate through a gap between the diaphragm and the seating surface

Methodology Applied

Scientific EffectDiaphragm movement:

Implementation Method 2

an orifice is formed in the through flow passage

Methodology Applied

Scientific EffectOrifice flow restriction:

Implementation Method 3

the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess

Methodology Applied

Scientific EffectSealing:

Data Source

PatentUS11427911B2Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

Publication Date: 2022.08.30 FUJIKIN INC

AI summary

A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.