Orthogonal Plate Fluid Supply System for Compact Gas Delivery
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Solution Overview
Problem
The existing fluid supply systems face challenges in size reduction due to the need for separate arrangements of process-gas, liquid, and purge-gas supply units in the same plane, which limits compactness.
Innovation Solution
A fluid supply system design featuring a support body with orthogonal plates allowing for a three-dimensional configuration, where the process-gas supply unit is on the top plate, the liquid supply unit is on the side plate, and the purge-gas supply unit is on the base plate, with communication mechanisms enabling efficient inter-unit connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the process-gas supply unit, liquid supply unit, and purge-gas supply unit are arranged in the same plane, then the ease of operation and maintenance is improved, but the overall size of the fluid supply system increases
Solution Approach 1:
The patent applies dimensional change by transitioning from a two-dimensional planar arrangement to a three-dimensional configuration. The process-gas supply unit, liquid supply unit, and purge-gas supply unit are arranged on different planes (top plate, front plate, and rear plate respectively), utilizing vertical and depth dimensions to reduce the overall footprint while maintaining operational accessibility
2Device complexity
If the process-gas supply unit, liquid supply unit, and purge-gas supply unit are arranged in the same plane, then the device complexity is reduced, but the overall size of the fluid supply system increases
Solution Approach 1:
The patent reduces device complexity by organizing units on separate plates that can be independently manufactured and assembled. The support body comprises a top plate, front plate, and rear plate, each carrying specific supply units, which simplifies the overall structure by distributing components across multiple dimensions rather than concentrating them in a single plane
3Volume of moving object
If the supply units are arranged in a three-dimensional configuration on orthogonal plates, then the overall size is reduced, but the device complexity increases
Solution Approach 1:
The patent segments the fluid supply system into distinct modular units: process-gas supply unit, liquid supply unit, and purge-gas supply unit, each mounted on separate plates. This segmentation allows for independent design, manufacturing, and assembly of each unit, reducing the complexity of the overall system despite the three-dimensional arrangement
Solution Approach 2:
By utilizing orthogonal plates arranged in three dimensions (top plate for process-gas, front plate for liquid, rear plate for purge-gas), the patent achieves compact integration without excessive complexity. The orthogonal arrangement provides clear spatial separation while maintaining structural coherence through the support body framework
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves a significant reduction in the overall size of the fluid supply system while maintaining efficient operation and reducing the impact of vibrations from other devices.
Implementation Method 1
a process-gas supply unit (4) provided on the top plate (24), the process-gas supply unit (4) being configured to vaporize liquid
Data Source
AI summary
A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.