Oscillator Signal Timing in Charged Particle Microscopy

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Solution Overview

Problem

Charged particle microscopy faces challenges in synchronizing laser and electron beams at picosecond timescales, leading to deviations in synchronization that degrade temporal resolution and compromise the accuracy of time-resolved EELS measurements due to thermal drift, mechanical vibrations, and electronic noise.

Innovation Solution

The synchronization of charged particle and light beams is achieved using an RF cavity to generate synchronized pulses, with a beam blanker controlling the timing and phase delay, and a beam picker adjusting the repetition rate to match the light beam pulses, allowing for precise temporal characterization of the light beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If beam chopping methods are used to address relaxation time properties and saturation effects, then the photoemitter performance is improved, but synchronization precision between pump and probe beams deteriorates due to active synchronization requirements between two independent sources

Engineering Contradiction:
Improvephotoemitter performanceVSAvoidsynchronization precision
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent merges the pump beam and probe beam into a single optical path and uses a single photoemitter source. The pump beam is modulated by chopping the electron beam, while the probe beam passes through the same photoemitter without requiring active synchronization. This eliminates the synchronization problem between two independent sources while maintaining photoemitter performance.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single photoemitter serves multiple functions: it generates both the pump beam (via beam chopping) and the probe beam (via direct transmission). This multi-functionality eliminates the need for separate sources and their associated synchronization requirements, achieving both reliable photoemitter operation and precise temporal characterization.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If active synchronization between pump and probe sources is implemented, then beam timing control is improved, but system complexity increases due to requirements for picosecond-level synchronization between two independent sources

Engineering Contradiction:
Improvebeam timing controlVSAvoidsynchronization system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines both beam paths through a single photoemitter, eliminating the need for complex active synchronization systems between two independent sources. The timing control is simplified to only require chopping synchronization of the electron beam, dramatically reducing system complexity while maintaining precise beam timing control.

Inventive Principle:
Principle #5Merging (Combining)

3Productivity

If thermal drift, mechanical vibrations, and electronic noise are present in the system, then system stability deteriorates, but maintaining operational functionality requires continuous operation of both beam sources

Engineering Contradiction:
Improveoperational continuityVSAvoidsystem stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

By using a single photoemitter for both pump and probe beams, the patent reduces the number of independent sources from two to one. This reduction in component count directly improves system stability by minimizing thermal drift, mechanical vibrations, and electronic noise from multiple sources, while maintaining continuous operational functionality through the unified beam path.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures sub-picosecond jitter and precise synchronization, enabling accurate ultrafast dynamics analysis and reducing the impact of external instabilities on EELS measurements.

Implementation Method 1

A repetition rate of the charged particle beam pulses is adjusted to a submultiple of a repetition rate of the light beam pulses

Methodology Applied
Scientific EffectElectromagnetic acceleration: Electromagnetic Induction

Implementation Method 2

a beam blanker controlling the timing and phase delay

Methodology Applied
Scientific EffectElectromagnetic deflection: Lorentz Force

Implementation Method 3

detecting charged particles that, based at least in part on the light beam pulse and the charged particle beam pulse, interacted with the sample

Methodology Applied
Scientific EffectInelastic scattering: Compton Scattering

Data Source

PatentUS20250349505A1Temporal characterization of oscillator signals in charged particle microscopy
Publication Date: 2025.11.13 FEI CO
  • US20250349505A1 patent drawing
  • US20250349505A1 patent drawing
  • US20250349505A1 patent drawing

AI summary

A method for characterization of a light beam within a charged particle column, the method comprising: directing a light beam pulse towards a sample within the charged particle column; directing a charged particle beam pulse towards the sample; detecting charged particles that, based at least in part on the light beam pulse and the charged particle beam pulse, interacted with the sample; determining a time delay between the charged particle beam pulse and the light beam pulse based at least in part on the charged particles; and determining at least one characteristic of the light beam pulse based at least in part on the time delay.