OTP Memory Cell Using Silicide Migration for Reliable Programming

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Solution Overview

Problem

Conventional programmable read-only memories (PROMs) face reliability issues due to the breakdown of gate oxides or metal/polymeric materials, and high-current densities require large control transistor sizes, increasing the size and cost of bit cells.

Innovation Solution

A one-time programmable memory cell is implemented using a single transistor with source-contact silicide migration, where a programming current increases the source resistance by causing silicide to migrate into the source region, achieved through CMOS processing without additional layers or masking steps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional gate oxide breakdown or metal strip breakdown is used for programming, then the memory cell can be programmed, but the reliability of the PROM is reduced

Engineering Contradiction:
Improvememory cell reliabilityVSAvoiddamage from breakdown
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent converts the harmful effect of high current density into a beneficial effect by utilizing it to induce silicide migration. Instead of causing destructive breakdown as in conventional methods, the high current density is controlled to migrate silicide from the source contact into the source region, increasing source resistance in a non-destructive manner that serves the programming function while maintaining reliability.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If high-current density is used to program the fuse, then the fuse can be programmed, but the control transistor size must be large

Engineering Contradiction:
Improveprogramming capabilityVSAvoidcontrol transistor size
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

The patent employs self-service by allowing the high current density itself to induce the desired silicide migration effect without requiring external control mechanisms. The current automatically causes silicide to migrate into the source region, increasing source resistance and achieving programming in a self-regulating manner that eliminates the need for large control transistors.

Inventive Principle:
Principle #25Self-service

3Reliability

If large control transistor size is used, then the fuse can be programmed with high current density, but the bit cell size and cost increase

Engineering Contradiction:
Improveprogramming capabilityVSAvoidbit cell size
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by modifying the electrical characteristics of the transistor, specifically increasing the source resistance through silicide migration. This parameter change enables the transistor to function as a programmable element without requiring changes to the physical size or structural complexity of the bit cell, thereby maintaining compact dimensions while achieving reliable programming.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances memory cell reliability and reduces the footprint while maintaining cost-effectiveness by utilizing a single transistor with increased source resistance for programming, avoiding damage to other cells in an array.

Implementation Method 1

conducting a programming current through the drain region and the source region may cause a source-contact silicide to migrate into the source region

Methodology Applied
Scientific EffectSilicide migration:

Implementation Method 2

increasing a source resistance of the transistor based on migration of the source-contact silicide into the source region

Methodology Applied
Scientific EffectElectrical resistance change: Electrical Resistance

Data Source

PatentUS20260040538A1One-time programmable memory cell
Publication Date: 2026.02.05 SEMICON COMPONENTS IND LLC
  • US20260040538A1 patent drawing
  • US20260040538A1 patent drawing
  • US20260040538A1 patent drawing

AI summary

A memory cell is disclosed. The memory cell comprises a transistor. The transistor includes a gate, a drain region coupled to a drain terminal by one or more drain contacts, and a source region coupled to a source terminal by a source contact. A cumulative drain-contact area of the one or more drain contacts of the transistor is greater than a source-contact area of the transistor. Further a source-contact silicide is located between the source contact and the source region, and the source-contact silicide is configured to migrate into the source region in response to a programming current conducted through the drain region and the source region.