Out-of-Plane to In-Plane Motion Conversion Actuator
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Solution Overview
Problem
Existing microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) actuators face limitations in converting out-of-plane motion to in-plane motion and vice versa, with electrostatic actuators providing limited energy and out-of-plane actuators lacking in-plane actuation capabilities.
Innovation Solution
A device comprising a deformable element anchored on a substrate with a free end, guided for in-plane translation, which can convert out-of-plane motion to in-plane motion by deforming out-of-plane when stimulated, allowing for in-plane actuation. This device can also convert in-plane motion to out-of-plane motion by rotating a mobile element connected to the deformable element, using materials like bimetallic or piezoelectric materials responsive to electric or thermal stimuli.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If electrostatic actuators with interdigitated fingers are used, then in-plane actuation is achieved, but energy capacity is limited
Solution Approach 1:
The patent applies dimensionality change by using out-of-plane deformable elements (bending in the vertical dimension) to generate in-plane motion (horizontal dimension). The deformable elements bend out-of-plane when stimulated, and through mechanical coupling with guide means, this out-of-plane deformation is converted to in-plane translational motion of the mobile element, thereby achieving high-energy in-plane actuation.
2Use of energy by moving object
If out-of-plane actuators with piezoelectric materials are used, then sufficient energy is provided, but in-plane actuation capability is lost
Solution Approach 1:
The patent introduces an intermediary mechanism consisting of guide means (such as beams or links) that couple the out-of-plane deformable element to the mobile element. This intermediary converts the out-of-plane bending motion into in-plane translational motion, allowing the high-energy piezoelectric or bimetallic actuator to produce in-plane actuation without direct out-of-plane movement of the mobile element.
3Ease of operation
If deformable elements are constrained to move only in-plane, then in-plane actuation is achieved, but energy capacity is reduced
Solution Approach 1:
The patent enables the deformable element to utilize the out-of-plane dimension for deformation while the mobile element remains constrained to in-plane motion. The guide means act as a mechanical transformer, converting out-of-plane bending of the deformable element into in-plane translation of the mobile element, thus achieving both high energy capacity and in-plane actuation capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient energy transfer and motion conversion, allowing for precise in-plane actuation and energy recovery, suitable for applications such as optical fiber alignment and fluid compression, while overcoming the energy limitations of existing actuators.
Implementation Method 1
the deformable element contains an electroactive material which contracts when an electric field is applied thereto
Implementation Method 2
the deformable element contains two materials having different thermal expansion coefficients, the element bends when heated beyond a given temperature
Data Source
AI summary
An actuator comprising two devices each comprising an out-of-plane deformable element, said deformable element comprising a first fixed end anchored on a substrate and a second free end relative to the substrate, said device also comprising means to guide the second free end in in-plane translation along a first direction, the first deformable element being capable of deforming out-of-plane through application of a stimulus so that the second free end draws close to the first fixed end following in-plane translational movement. The actuator also comprises an element mobile in rotation about an axis orthogonal to the plane and mechanically linked to the free ends of the deformable elements, and a translationally mobile element mechanically linked to the rotationally mobile element.