Overhanging Screen Substrate Handling Tool for Epitaxial Reactors

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Solution Overview

Problem

In epitaxial reactors, substrates experience thermal shock due to rapid temperature changes during introduction and extraction, which can cause damage, especially when transitioning from ambient temperatures to high processing temperatures and vice versa.

Innovation Solution

A tool with an overhanging screen is used to handle substrates, which reduces thermal shock by slowing heat transmission through radiation, conduction, and convection, maintaining a temperature difference between the substrate faces and the screen.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If substrates are introduced or extracted when the chamber is at high temperature (700-1100°C) to reduce reactor cycle time, then productivity is improved, but substrates are subjected to thermal shock causing damage

Engineering Contradiction:

Improvereactor cycle timeVSAvoidsubstrate integrity

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

A screen positioned overhanging the substrates acts as an intermediary element between the hot chamber environment and the substrates. The screen is configured to control and moderate heat transmission to the substrates, allowing the chamber to be maintained at high temperature for productivity while protecting substrates from direct thermal shock during introduction and extraction operations

Inventive Principle:

Principle #24Intermediary (Mediator)

2Speed

If substrates are rapidly heated from ambient temperature (25°C) to high temperature (900°C) during introduction, then processing efficiency is improved, but thermal shock damages the substrates

Engineering Contradiction:

Improveheating speedVSAvoidthermal shock

Core Design Contradiction:

SpeedVSObject-affected harmful factors

Solution Approach 1:

The screen is positioned in advance overhanging the substrates before rapid heating occurs. This pre-positioned screen provides a cushioning effect by controlling the rate of heat transmission, preventing direct and abrupt thermal exposure to the substrates while still allowing efficient heating to occur

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The tool effectively minimizes thermal shock by maintaining a consistent temperature gradient, reducing the risk of substrate damage and allowing for more efficient reactor operation with reduced cycle time.

Implementation Method 1

slowing heat transmission through radiation, conduction, and convection

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

slowing heat transmission through radiation, conduction, and convection

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

slowing heat transmission through radiation, conduction, and convection

Methodology Applied

Scientific EffectThermal convection: Convection

Implementation Method 4

the thermal shock essentially affects the upper face of the substrates, i.e., the exposed face, and causes a temperature difference between the upper face and lower face of the substrates

Methodology Applied

Scientific EffectThermal shock: Thermal Shock

Data Source

PatentUS20230197499A1Tool for handling substrates with overhead screen and relevant handling methods and epitaxial reactor

Publication Date: 2023.06.22 LPE SPA

AI summary

The tool (4000) for handling substrates (3000) comprises a fork (4100); the fork (4100) comprises two arms (4120, 4140) configured to directly or indirectly grip or support one or more substrates (3000) by applying by contact lateral and/or vertical force when in use; there is provided a screen (4500) fixed or fixable to the fork (4100) so as to be overhanging at distance the substrate(s) (3000) when, in use, it/they is/are gripped or supported by the fork (4100).