Overhead Conveyance System for Semiconductor Processing
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Solution Overview
Problem
Existing conveyance systems for workpieces in manufacturing processes face inefficiencies due to the need for multiple workpieces to wait when processing apparatuses stop, leading to reduced processing efficiency and complexity in system design due to interference with processing apparatus structures.
Innovation Solution
A conveyance system featuring a conveyance passage above processing apparatuses, an automated conveying vehicle with storage and control mechanisms, and a stock unit for efficient transfer of workpieces between storage and processing locations, allowing for independent operation and easy construction without interference with side-mounted structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If workpieces are conveyed one by one to processing apparatuses according to operation status, then processing efficiency is improved, but the conveyance system becomes complex and construction becomes difficult due to interference with side-mounted structures
Solution Approach 1:
The conveyance passage is moved from a horizontal arrangement at the side of processing apparatuses to a vertical arrangement above the processing apparatuses. This dimensional change allows the conveyance system to operate in a different spatial plane, avoiding interference with side-mounted structures such as conduit connecting parts and maintenance doors, while still enabling efficient one-by-one workpiece conveyance to multiple processing apparatuses.
2Ease of manufacture
If a conveyance passage is designed to avoid side-mounted structures, then ease of construction is improved, but the path length increases
Solution Approach 1:
By transitioning from horizontal to vertical conveyance arrangement, the system achieves a more direct path between workpiece stocker and multiple processing apparatuses. The vertical passage allows workpieces to be conveyed directly above each apparatus without needing to navigate around side-mounted components, thereby reducing overall path length while maintaining construction simplicity.
Data Source
AI summary
A conveyance system for conveying a workpiece to each of a plurality of processing apparatuses includes a conveyance passage, an automated conveying vehicle for travelling on the conveyance passage, the automated conveying vehicle including a workpiece storage member, travelling mechanisms, and a receiver, a stock unit including a storage member holding base and a receiver, and a storage member conveying unit for conveying the workpiece storage member between a region of the conveyance passage above the stock unit and the storage member holding base or between a region of the conveyance passage above the processing apparatus and the inside of the processing apparatus.