Overhead Cross-System Transport for Semiconductor Wafer Handling
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Solution Overview
Problem
In semiconductor fabrication facilities, the dual role of robots in stockers for both single-system and cross-system transportation leads to potential bottlenecks and inefficient space utilization, causing traffic congestion and reduced cost-effectiveness.
Innovation Solution
A cross-system transport apparatus comprising a conveyor, hoist, and slide table or crane with a robot arm, which transfers wafer carriers between overhead shuttle and hoist systems without occupying valuable shop floor space, utilizing a controller system for coordinated operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a robot inside the stocker performs both single-system transportation and cross-system transportation, then the stocker can serve dual purposes, but the robot becomes overloaded and causes traffic congestion
Solution Approach 1:
The patent divides the transportation function into two separate systems: a stocker system for single-system transportation and a cross-system transport apparatus for cross-system transportation. This segmentation allows each system to specialize in its specific function, preventing the robot from being overloaded and causing congestion while maintaining versatility through coordinated operation of both systems
Solution Approach 2:
The patent extracts the cross-system transportation function from the stocker by introducing a dedicated cross-system transport apparatus. This extraction removes the bottleneck caused by the robot's dual role, allowing the stocker to focus solely on single-system transportation while the new apparatus handles cross-system transfers independently
2Quantity of substance
If a stocker is used for storage of wafer carriers, then the stocker occupies valuable shop floor space, but the stocker provides necessary storage capacity
Solution Approach 1:
The patent transitions from floor-based storage to overhead storage by suspending the stocker from the ceiling. This dimensional change allows wafer carriers to be stored in the vertical space above the shop floor, maintaining storage capacity while freeing up valuable floor space for other manufacturing operations
Solution Approach 2:
The patent introduces a movable cross-system transport apparatus that can dynamically transfer wafer carriers between the stocker and overhead hoist transport systems. This dynamic capability allows flexible utilization of storage space and transportation routes, optimizing both storage efficiency and space utilization
Data Source
AI summary
A system for managing semiconductor production includes a conveyor to convey a wafer carrier to or from an overhead hoist transfer system. The system also includes a cross-system transport apparatus to transfer the wafer carrier between the conveyor and an overhead shuttle system.