Overhead FOUP Transport with Vertical Shelf Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing overhead transport vehicles for semiconductor manufacturing factories lack the capability to efficiently utilize vertical space, limiting the storage capacity for articles as processing speeds increase, and require additional configurations to accommodate more articles.
Innovation Solution
The overhead transport vehicle incorporates a first and second transfer device that moves holders holding articles upward and laterally, allowing placement at higher positions, and includes mechanisms for downward movement and lateral sliding to prevent interference, enabling the use of previously unused space by transferring articles to upper and lower positions effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If articles are stored on shelves supported by poles arranged one above another, then storage capacity is provided, but the vertical space above the shelves cannot be utilized and storage capacity is limited
Solution Approach 1:
The invention transitions from horizontal shelf arrangement to vertical article placement by enabling the overhead transport vehicle to move articles to positions above the shelves. The transfer device moves the holder upward from the holding position to an upper transfer position, utilizing the previously unused vertical space above conventional shelf structures.
Solution Approach 2:
The overhead transport vehicle itself performs the function of placing articles in elevated storage positions, eliminating the need for separate vertical lifting mechanisms or additional drivers. The same vehicle that transports articles horizontally also provides vertical transfer capability through its integrated transfer device.
2Quantity of substance
If the overhead transport vehicle includes a transfer device to move articles vertically, then storage capacity increases, but the structure becomes more complex
Solution Approach 1:
The transfer device is designed to perform multiple functions: it can move the holder vertically upward to place articles above shelves, move downward to place articles on lower shelves, and move laterally to transfer articles between positions. This multi-functionality reduces the need for separate mechanisms for each movement type.
Solution Approach 2:
The transfer device employs movable components including a lateral movement mechanism and a vertical movement mechanism that can dynamically adjust the holder's position in multiple directions. The driver and operator can be moved in the lateral direction by the first movement, and the system adapts its configuration based on the required transfer destination.
3Device complexity
If the driver and operator are moved laterally by the first movement, then the number of drivers required decreases, but the operator needs to be positioned closer to the upper shelf
Solution Approach 1:
The driver and operator are combined into a single movable assembly that travels laterally with the holder during the first movement. This merging eliminates the need for a separate driver mechanism while maintaining the ability to transfer articles to upper shelves. The operator is positioned closer to the upper shelf by using the same lateral movement mechanism as the article holder.
Data Source
AI summary
An overhead transport vehicle travels along a rail on a ceiling of a building to transport a FOUP. The overhead transport vehicle includes a holding base and an upper shelf transfer device. The holding base holds at least one of a side surface and a bottom surface of the FOUP. The upper shelf transfer device moves the holding base at least upwardly while holding the FOUP. The upper shelf transfer device moves the holding base from the holding position in which the holding base holds and transfers the FOUP to the upper transfer position to transfer the FOUP, which is a different position from the holding position in a plan view and higher than the holding position.