Overhead and Local Track Transport System for Semiconductor Wafer Handling
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Solution Overview
Problem
Existing transport systems for semiconductor wafers occupy excessive floor space and block the front surface of processing devices due to parallel overhead tracks and buffers, making it difficult to supply and remove articles efficiently without manual access interference.
Innovation Solution
A transport system with an overhead travelling vehicle track and a local track positioned below and parallel to the overhead track, featuring buffers upstream and downstream of loading ports, allowing the overhead and local vehicles to perform delivery and receipt operations without blocking the processing device's front surface, and minimizing floor space usage by vertically overlapping their travel paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If parallel overhead tracks are provided for long-distance and short-distance transport, then article delivery speed is improved, but floor space occupation increases
Solution Approach 1:
The patent transitions from a two-dimensional parallel track layout to a three-dimensional stacked configuration. The first overhead track is positioned at a higher elevation than the second overhead track, allowing both long-distance and short-distance transport paths to occupy different vertical levels. This dimensional change enables simultaneous operation of both tracks without requiring additional floor space, thereby maintaining high article delivery speed while reducing the planar footprint of the transport system.
2Productivity
If a buffer is disposed in front of a processing device, then article supply efficiency is improved, but access to the processing device front surface is blocked
Solution Approach 1:
The patent relocates the buffer from a horizontal position in front of the processing device to a vertical position above it. The buffer is disposed on the first overhead track at a higher elevation, allowing articles to be transferred vertically to the processing device's loading port. This vertical arrangement maintains efficient article supply through the buffer while preserving unobstructed access to the front surface of the processing device for operational personnel.
3Loss of time
If buffers are positioned to enable quick article supply, then processing device wait time is reduced, but manual access difficulty increases
Solution Approach 1:
The patent positions buffers vertically above the processing device on the overhead track system rather than horizontally in front of it. This elevated buffer configuration enables rapid automated article transfer to reduce processing device wait time, while simultaneously preserving clear horizontal access paths at the front surface of the processing device for manual operations and personnel movement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces floor space occupation, allows swift supply and removal of articles, and prevents interference with local vehicles, enabling efficient article transport while maintaining access to the processing device's front surface.
Implementation Method 1
an overhead travelling vehicle that travels in one direction along the overhead travelling vehicle track and includes a hoist
Data Source
AI summary
In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.