OVJP Micronozzle Array with Segmented Gas Channels
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Solution Overview
Problem
Existing organic vapor jet printing (OVJP) technologies face challenges in achieving uniform film thickness and precise control over the deposition of organic layers in organic light-emitting diodes (OLEDs), leading to issues with overspray and non-uniform features in printed lines.
Innovation Solution
A micronozzle array with a linear array of depositors and orifice arrays that regulate flow through separate gas distribution channels, utilizing a combination of delivery and exhaust apertures with confinement gas to confine the deposition area and prevent overspray, allowing for precise control over the deposition process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional OVJP technology is used, then the deposition process can be performed, but uniform film thickness and precise control over deposition are not achieved
Solution Approach 1:
The gas distribution system is segmented into multiple separate channels (first gas distribution channel, second gas distribution channel, third gas distribution channel) that are independently controlled. This segmentation allows precise regulation of gas flow to different regions of the micronozzle array, enabling uniform film thickness deposition across the substrate while maintaining a manageable device structure through modular channel design.
Solution Approach 2:
Different gas distribution channels are configured with specific aperture arrangements (first orifice array, second orifice array, third orifice array) tailored to local deposition requirements. Each channel serves a specific region of the micronozzle array with optimized gas flow characteristics, allowing precise control over deposition parameters in different areas to achieve overall uniformity.
2Productivity
If gas flow is increased to improve deposition speed, then productivity increases, but overspray and non-uniform features occur
Solution Approach 1:
The gas distribution system is divided into multiple independently controlled channels that can regulate gas flow to different regions of the micronozzle array. This allows optimization of deposition speed in high-productivity areas while maintaining precise control in regions requiring uniformity, resolving the contradiction between overall productivity and local feature uniformity.
Solution Approach 2:
The system employs multiple orifice arrays with different aperture configurations and gas distribution characteristics. By adjusting gas flow parameters (flow rate, pressure, distribution pattern) through different channels, the system can dynamically optimize deposition conditions to maintain feature uniformity across varying deposition speeds.
3Stability of the object's composition
If a single gas distribution channel is used, then device complexity is reduced, but uniform gas flow distribution to all depositors is not achieved
Solution Approach 1:
The gas distribution system is segmented into multiple channels, each serving specific regions of the micronozzle array. This segmentation enables independent optimization of gas flow parameters for different depositor groups, achieving uniform gas flow distribution across all depositors while maintaining modular device architecture that manages complexity through functional分区.
Solution Approach 2:
Multiple gas distribution channels are configured to work together as an integrated system, with each channel performing a specific function (first channel for initial gas distribution, second channel for intermediate regions, third channel for edge regions). This multi-functional approach achieves comprehensive uniform gas flow distribution while organizing device complexity into coordinated functional units.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables uniform film thickness and precise feature formation, reducing overspray and improving the scalability and efficiency of the OVJP process, allowing for faster printing with mesa-like thickness profiles and reduced edge effects.
Implementation Method 1
plurality of orifice arrays, wherein the width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through the delivery gas distribution channel
Implementation Method 2
utilizing a combination of delivery and exhaust apertures with confinement gas to confine the deposition area and prevent overspray
Implementation Method 3
micronozzle array for organic vapor jet printing (OVJP)... enables uniform film thickness and precise feature formation
Data Source
AI summary
Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel. The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.