Oxide-Coated Aluminum Substrate Support for High-Temperature Processing
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Solution Overview
Problem
The use of aluminum alloy in process vessels for substrate processing at high temperatures leads to the vaporization and scattering of constituents, contaminating the inner portion and the substrate, resulting in improper processing or lot rejection.
Innovation Solution
A technique involving heating the substrate support surface to a predetermined temperature under controlled pressure and forming an aluminum oxide coating on the surface by maintaining that temperature for a specific duration to prevent the vaporization of magnesium from the aluminum alloy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If aluminum alloy is used in the process vessel for high temperature substrate processing, then the process vessel can be heated to high temperature for effective substrate processing, but the constituents of the aluminum alloy are vaporized and scattered, contaminating the inner portion of the process vessel and the substrate
Solution Approach 1:
The invention uses a composite structure consisting of a substrate support made of aluminum alloy and a coating layer made of magnesium oxide or aluminum oxide formed on its surface. This composite structure allows the substrate support to be heated to high temperatures for effective substrate processing while the oxide coating layer prevents vaporization and scattering of the aluminum alloy constituents, thereby eliminating contamination of the process vessel and substrate.
Solution Approach 2:
The invention introduces an intermediary substance (magnesium oxide or aluminum oxide coating layer) between the aluminum alloy substrate support and the process environment. This coating layer acts as a protective barrier that prevents direct interaction between the aluminum alloy constituents and the high temperature environment, thereby preventing vaporization and scattering while allowing heat to be transmitted to the substrate for processing.
2Productivity
If the substrate support is heated to high temperature for substrate processing, then effective processing can be performed, but contamination occurs requiring lot rejection
Solution Approach 1:
The composite structure of aluminum alloy substrate support with magnesium oxide or aluminum oxide coating layer enables the system to be heated to high temperatures for effective substrate processing while preventing vaporization and scattering of aluminum alloy constituents. This eliminates contamination of the process vessel and substrate, ensuring processing quality and preventing lot rejection, thereby maintaining both high productivity and reliability.
3Temperature
If aluminum alloy structure is used in the process vessel, then the process vessel can withstand high temperature processing, but the aluminum alloy constituents vaporize and scatter under vacuum conditions
Solution Approach 1:
The invention uses a composite structure where the substrate support is made of aluminum alloy and is covered with a coating layer of magnesium oxide or aluminum oxide. This composite structure allows the process vessel to be heated to high temperatures under vacuum conditions while the oxide coating layer prevents vaporization and scattering of the aluminum alloy constituents, thereby eliminating substance loss and contamination.
Solution Approach 2:
The magnesium oxide or aluminum oxide coating layer serves as an intermediary barrier between the aluminum alloy substrate support and the vacuum environment. This coating layer prevents direct vaporization of aluminum alloy constituents under vacuum conditions while allowing heat to be transmitted for effective substrate processing, thereby eliminating substance loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents the contamination of the process vessel and substrate by forming a protective oxide coating that effectively suppresses the vaporization and precipitation of magnesium, ensuring normal processing operations.
Implementation Method 1
forming a coating film of aluminum oxide on the surface of the substrate support
Implementation Method 2
maintaining a temperature of the surface of the substrate support at the predetermined first temperature for a predetermined time
Data Source
AI summary
Described herein is a technique capable of preventing a constituent contained in an aluminum alloy from being vaporized and scattered when the aluminum alloy is used in a process vessel which is heated to a high temperature. According to one aspect thereof, there is provided a technique including a process chamber; a substrate support configured to support a substrate in the process chamber; and a heater configured to heat the substrate supported by the substrate support, wherein the substrate support is made of an aluminum alloy containing magnesium, and a surface of the substrate support is coated by a coating film of aluminum oxide containing magnesium oxide and being substantially free of magnesium.