Oxide Dielectric Sensor Element for Integrated Light Sensing and Memory

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Solution Overview

Problem

Current CMOS image sensor and NAND flash memory technologies face challenges in achieving higher resolution and scalability due to minimal charge storage, leading to parameter variability and limited operating speed, as well as integration issues with aspect ratio differences between sensing and memory elements.

Innovation Solution

A sensor element and image sensor utilizing an oxide dielectric layer with conductive filaments that modulate resistance in response to optical light, allowing for increased resistance and scalable design, enabling direct integration of light sensing and memory functions without external data transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If sensor and memory component dimensions are scaled down to achieve higher sensing resolution and storage capacity, then resolution and storage capacity are improved, but charge storage quantity decreases leading to parameter variability and memory window shrinkage

Engineering Contradiction:
Improvesensing resolutionVSAvoidcharge storage quantity
Core Design Contradiction:
Manufacturing precisionVSQuantity of substance

Solution Approach 1:

The patent merges the sensor element and memory element into a single integrated device structure. The sensor element includes a photodiode for light detection and a memory element with floating gate for charge storage, both formed within the same device. This integration allows the sensor to maintain high resolution while the memory element provides sufficient charge storage capacity, eliminating the trade-off between scaling for resolution and maintaining charge storage quantity.

Inventive Principle:
Principle #5Merging (Combining)

2Device complexity

If sensor and memory elements are integrated on-chip, then integration density is improved, but aspect ratio differences between sensing and memory elements prevent direct integration

Engineering Contradiction:
Improveintegration densityVSAvoidintegration compatibility
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent employs a vertical stacked architecture where the photodiode, charge storage region, and floating gate are arranged in vertical layers rather than lateral placement. This dimensional transition from planar to vertical integration allows elements with different aspect ratios to be integrated on-chip without conflict, as they occupy different vertical levels within the same footprint area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Area of stationary object

If sensor and memory circuits are integrated at component level, then device area is reduced, but operating speed is limited by external data buses

Engineering Contradiction:
Improvedevice areaVSAvoidoperating speed
Core Design Contradiction:
Area of stationary objectVSSpeed

Solution Approach 1:

The patent combines the sensor element and memory element into a single integrated device with direct internal connection. The photodiode and floating gate are formed within the same device structure, allowing charge to be transferred directly from the photodiode to the floating gate without traversing external data buses. This internal integration eliminates the speed bottleneck while maintaining compact device area.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances image sensing resolution and scalability, maintains sensitivity, and extends memory retention by integrating light sensing and memory capabilities within a single device, overcoming the limitations of traditional CMOS technologies.

Implementation Method 1

The oxide dielectric element may be configured to form a conductive filament upon a potential difference between the first supply voltage and the second supply voltage exceeding a threshold level, thereby decreasing a resistance of the oxide dielectric element

Methodology Applied
Scientific EffectElectrochemical reactions:

Implementation Method 2

The detector may be configured to detect an increase in the resistance of the oxide dielectric element upon the oxide dielectric element receiving the optical light

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS10269860B2Sensor element, image sensor, methods of forming and operating the same
Publication Date: 2019.04.23 NANYANG TECH UNIV
  • US10269860B2 patent drawing
  • US10269860B2 patent drawing
  • US10269860B2 patent drawing

AI summary

A sensor element for sensing optical light may be provided. The sensor element may include a first electrode for electrically coupling to a first supply voltage, a second electrode for electrically coupling to a second supply voltage, and an oxide dielectric element between the first electrode and the second electrode. The oxide dielectric element may be configured to form a conductive filament upon a potential difference between the first supply voltage and the second supply voltage exceeding a threshold level, thereby decreasing a resistance of the oxide dielectric element. The sensor element may also include a detector. The first electrode may be configured to allow the optical light to pass through the first electrode to the oxide dielectric element. The detector may be configured to detect an increase in the resistance of the oxide dielectric element upon the oxide dielectric element receiving the optical light.