Oxide Semiconductor Display Stack With Oxygen Supply Layer
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Solution Overview
Problem
Display devices using oxide semiconductors face issues with oxygen defects acting as carriers, leading to conductor-like behavior and low threshold voltages, which affect reliability and performance.
Innovation Solution
Incorporation of an oxygen supply layer, typically made of metal oxides like indium, zinc, and gallium, to supply oxygen to the semiconductor layer, ensuring adequate oxygen levels and maintaining semiconductor functionality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If oxide semiconductor is used in the semiconductor layer, then the device can be manufactured with existing processes, but oxygen defects act as carriers causing conductor-like behavior and low threshold voltage
Solution Approach 1:
An oxygen supply layer is formed beneath the oxide semiconductor layer before device operation. This layer pre-supplies oxygen to fill oxygen vacancies in the semiconductor, preventing the semiconductor from exhibiting conductor-like behavior due to oxygen defects, thereby maintaining reliable threshold voltage characteristics
Solution Approach 2:
The oxygen supply layer acts as an intermediary between the substrate and the oxide semiconductor layer. It mediates oxygen transfer to the semiconductor layer, ensuring adequate oxygen supply without requiring complex manufacturing processes or changing the fundamental oxide semiconductor material structure
2Reliability
If the oxygen supply layer is made thicker to supply more oxygen, then oxygen vacancies are better eliminated, but the device structure becomes more complex and manufacturing difficulty increases
Solution Approach 1:
The thickness of the oxygen supply layer is optimized within a specific range (30%-50% of the semiconductor layer thickness) to achieve adequate oxygen supply without excessive complexity. This parameter optimization balances oxygen supply effectiveness with manufacturing feasibility and structural simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The oxygen supply layer stabilizes the semiconductor, enhancing reliability by eliminating oxygen vacancies and increasing threshold voltage, resulting in improved operational stability.
Implementation Method 1
an oxygen supply layer, typically made of metal oxides like indium, zinc, and gallium, to supply oxygen to the semiconductor layer
Data Source
AI summary
A display device according to an embodiment includes a light blocking layer disposed on a substrate; an oxygen supply layer disposed on and contacting the light blocking layer; a semiconductor layer disposed on the oxygen supply layer; and a light emitting diode electrically connected with the semiconductor layer. The semiconductor layer includes an oxide semiconductor, and the oxygen supply layer includes a metal oxide that includes at least one of indium, zinc, gallium, and tin.