Oxide Semiconductor Memory Cell with Back Gate Transistors

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current semiconductor memory devices face challenges in achieving high reliability, large storage capacity, small area occupation, and low production costs, particularly in using oxide semiconductor transistors which require advanced configurations to enhance data retention and writing efficiency.

Innovation Solution

A NAND memory device design incorporating oxide semiconductor transistors with back gates, where each memory cell includes a writing transistor and a reading transistor, allowing for reduced storage capacitor size or elimination, and a specific wiring configuration that enables efficient data writing and reading operations without the need for high voltage or frequent erasing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If oxide semiconductor transistors are used in memory cells, then data retention and reliability are improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvedata retentionVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The memory cell is divided into multiple transistor components (writing transistor with oxide semiconductor, reading transistor, storage capacitor) with distinct functions. The writing transistor handles data storage with high reliability, while the reading transistor handles data retrieval, separating concerns and managing complexity through functional segmentation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The oxide semiconductor transistor serves multiple functions: it acts as both the writing transistor for data storage and can function as the reading transistor when configured with a back gate. This multi-functionality reduces the total number of components needed while maintaining high reliability data retention

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Area of moving object

If storage capacitor size is reduced or eliminated in memory cells, then area occupation is reduced, but data retention capability may be compromised

Engineering Contradiction:
Improvearea occupationVSAvoiddata retention
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The invention extracts the data retention function from the traditional storage capacitor by using the oxide semiconductor transistor's inherent low off-state current characteristic. The transistor itself becomes the data holding element, eliminating or reducing the need for a separate storage capacitor while maintaining data retention capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention changes the key parameter of off-state current to an extremely low level by using oxide semiconductor material. This parameter change allows the transistor to hold data without requiring a large storage capacitor, as the minimal leakage current naturally preserves data over time, enabling area reduction while maintaining reliability

Inventive Principle:
Principle #35Parameter changes

3Productivity

If multiple transistors are included in each memory cell, then data writing and reading efficiency are improved, but manufacturing cost and device area increase

Engineering Contradiction:
Improvewriting efficiencyVSAvoidmanufacturing cost
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The invention merges the function of the storage element with the writing transistor by using the oxide semiconductor transistor's gate as both the control terminal and the data storage node. This combining of functions reduces the number of separate components that need to be manufactured and connected, lowering manufacturing complexity and cost while maintaining efficient data writing capability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The oxide semiconductor transistor with back gate configuration serves as a universal component that can perform both writing and reading operations. This multi-functionality reduces the total transistor count per memory cell, thereby reducing manufacturing steps, material usage, and production costs while maintaining high writing and reading efficiency

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS11711922B2Memory device with memory cells comprising multiple transistors
Publication Date: 2023.07.25 SEMICON ENERGY LAB CO LTD
  • US11711922B2 patent drawing
  • US11711922B2 patent drawing
  • US11711922B2 patent drawing

AI summary

A memory device with large storage capacity is provided. A NAND memory device includes a plurality of connected memory elements each provided with a writing transistor and a reading transistor. An oxide semiconductor is used in a semiconductor layer of the writing transistor, whereby a storage capacitor is not necessary or the size of the storage capacitor can be reduced. The reading transistor includes a back gate. When a reading voltage is applied to the back gate, data stored in the memory element is read out.