Oxide-Semiconductor Display Structure for Reliable Electrode Connections
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Solution Overview
Problem
Existing display apparatuses face challenges in achieving a simple stacked structure while maintaining reliability, particularly in the integration of semiconductor layers and electrodes, which affects the overall performance and durability of the display.
Innovation Solution
A display apparatus is designed with a substrate, semiconductor layer, and a specific electrode configuration that includes a first region with lower resistance, connected through contact holes, and a capacitor electrode with oxide semiconductor, along with a method of manufacturing that involves precise etching and doping processes to form these elements, ensuring a reliable and efficient electrical connection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional stacked structure with multiple organic and inorganic layers is used, then reliability is improved, but device complexity increases
Solution Approach 1:
The patent removes the organic insulating layer from the stacked structure, retaining only the essential inorganic insulating layers (first and second inorganic insulating layers). This extraction of the organic layer simplifies the overall structure while maintaining the necessary insulation and protection functions through the inorganic layers alone, thereby reducing device complexity while preserving reliability.
Solution Approach 2:
The inorganic insulating layers perform multiple functions: they provide electrical insulation, mechanical protection, and serve as barriers against environmental factors. By having the inorganic layers fulfill multiple roles that would traditionally require separate organic layers, the patent reduces the number of components needed while maintaining system reliability.
2Ease of manufacture
If the semiconductor layer has uniform resistance, then manufacturing is simpler, but electrical connectivity and performance are reduced
Solution Approach 1:
The semiconductor layer is designed with non-uniform resistance distribution: a first region with lower resistance for efficient electrical connection to the first electrode, and a channel region with higher resistance for proper transistor operation. This local differentiation of electrical properties optimizes both connectivity in the source/drain regions and device performance in the channel, resolving the contradiction between manufacturing simplicity and electrical performance.
3Ease of manufacture
If contact holes are not precisely aligned with the first region, then manufacturing is easier, but electrical connection reliability deteriorates
Solution Approach 1:
The first region is pre-formed with distinct boundaries and lower resistance before contact hole formation. This preliminary structuring provides clear alignment targets for subsequent contact hole etching, making it easier to achieve precise alignment. The pre-defined low-resistance region acts as a guide that simplifies the alignment process while ensuring reliable electrical connection when contact holes are formed.
Data Source
AI summary
A display apparatus includes a substrate, a semiconductor layer on the substrate, the semiconductor layer including an oxide semiconductor, a channel region and a first region which extends from the channel region to a first edge of the semiconductor layer and has a lower resistance than that of the channel region, a first inorganic insulating layer covering the semiconductor layer and including a first contact hole which overlaps the first region, a first electrode on the first inorganic insulating layer, overlapping the first region and electrically connected to the first region through the first contact hole, a gate electrode on the first inorganic insulating layer and overlapping the channel region, a second inorganic insulating layer covering the first electrode and the gate electrode, and a display element on the second inorganic insulating layer.