Oxide Semiconductor Memory Cell Verification

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Solution Overview

Problem

Current semiconductor memory devices face challenges in accurately detecting defective memory cells with shorter data holding times due to the time-consuming nature of existing verification methods, which increases manufacturing costs.

Innovation Solution

The implementation of a memory device structure that includes a first capacitor with significantly higher capacitance than a second capacitor, allowing for charge storage and verification operations to be performed efficiently, along with the use of transistors with oxide semiconductors having wider band gaps and lower intrinsic carrier densities to minimize off-state current and extend data holding times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a general verification method is used where data is read immediately after data is written, then the verification operation is fast, but it cannot accurately detect memory cells with short data holding times because the digital value has not changed yet

Engineering Contradiction:
Improvedetection accuracy of defective memory cellsVSAvoidverification operation time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies preliminary action by performing a write operation to store data in the memory cell before the verification operation. This ensures that the data is properly stored and the digital value has had time to change, allowing accurate detection of defective memory cells with short holding times. The write operation precedes the read operation, creating the necessary temporal separation for accurate measurement.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces dynamic control of the verification timing by making the verification operation configurable rather than fixed. The verification can be performed at different time points after writing, allowing the system to adapt to different data holding times. This dynamic approach enables accurate detection of both normal and defective memory cells by adjusting the verification timing based on the specific memory cell characteristics.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If the verification operation time is extended to accurately detect defective memory cells, then detection accuracy improves, but manufacturing cost increases

Engineering Contradiction:
Improvedetection accuracy of defective memory cellsVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent changes the temporal parameter of the verification operation by introducing a configurable delay between write and read operations. Instead of using a fixed immediate read, the verification can be delayed to allow sufficient time for data stabilization in memory cells with short holding times. This parameter adjustment enables accurate detection without requiring excessive verification time, thereby controlling manufacturing costs while improving detection accuracy.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If transistors with oxide semiconductors are used, then off-state current is reduced and data holding time is extended, but device complexity increases

Engineering Contradiction:
Improvedata holding time and off-state current characteristicsVSAvoidtransistor structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent changes the material parameter of the transistor by using oxide semiconductors with wider band gaps and lower intrinsic carrier densities. This material substitution fundamentally improves the off-state current characteristics and extends data holding times. The oxide semiconductor layer is formed between the gate electrode and the source/drain regions, creating a transistor structure that achieves superior electrical characteristics while maintaining reasonable manufacturing complexity through established deposition techniques.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables accurate and rapid detection of defective memory cells, reducing manufacturing costs and improving the reliability of semiconductor devices by allowing for quicker verification of data holding times and minimizing charge leakage.

Implementation Method 1

transistors with oxide semiconductors having wider band gaps and lower intrinsic carrier densities to minimize off-state current

Methodology Applied
Scientific EffectBand gap:

Implementation Method 2

transistors with oxide semiconductors having wider band gaps and lower intrinsic carrier densities to minimize off-state current

Methodology Applied
Scientific EffectIntrinsic carrier density:

Implementation Method 3

a first capacitor with significantly higher capacitance than a second capacitor, allowing for charge storage and verification operations to be performed efficiently

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS9570141B2Memory device having a transistor including a semiconductor oxide
Publication Date: 2017.02.14 SEMICON ENERGY LAB CO LTD
  • US9570141B2 patent drawing
  • US9570141B2 patent drawing
  • US9570141B2 patent drawing

AI summary

To provide a memory device which can perform verification operation for detecting a memory cell whose data holding time is shorter than a predetermined length, accurately in a short time. Each memory cell includes at least a first capacitor, a second capacitor, and a transistor which functions as a switching element for controlling supply, storage, and release of charge in the first capacitor and the second capacitor. The capacitance of the first capacitor is thousand or more times the capacitance of the second capacitor, preferably ten thousand or more times the capacitance of the second capacitor. In normal operation, charge is stored using the first capacitor and the second capacitor. In performing verification operation for detecting a memory cell whose data holding time is shorter than a predetermined length, charge is stored using the second capacitor.