Oxide Semiconductor Pixel Electrode and Capacitor Integration

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Solution Overview

Problem

Current display devices require additional manufacturing steps to form a capacitor and pixel electrode, increasing costs and complexity, as they are formed in separate steps from the oxide semiconductor layer used in the transistor.

Innovation Solution

A display device design where the oxide semiconductor layer serves as both the pixel electrode and one electrode of the capacitor, eliminating the need for additional conductive or dielectric layers, and allowing simultaneous formation with the transistor components, thereby reducing manufacturing steps and costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the pixel electrode and capacitor electrode are formed as separate layers from the oxide semiconductor layer, then the transistor can achieve favorable electrical characteristics, but the manufacturing process requires additional steps and higher costs

Engineering Contradiction:
Improveelectrical characteristics of transistorVSAvoidmanufacturing cost and process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The oxide semiconductor layer is designed to serve multiple functions simultaneously: as the channel formation region for the transistor and as the electrode for the capacitor. This multi-functional design eliminates the need for separate conductive layers, reducing manufacturing steps while maintaining favorable electrical characteristics through controlled doping or plasma treatment of the oxide semiconductor layer

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the transistor channel layer and capacitor electrode into a single oxide semiconductor layer. By forming both structures from the same material layer with appropriate doping or treatment, the invention reduces the number of manufacturing steps and material deposition processes, thereby lowering production costs while preserving transistor performance

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If additional conductive layers are formed for the pixel electrode and capacitor electrode, then the device functionality is achieved, but the number of manufacturing steps increases

Engineering Contradiction:
Improvedevice functionalityVSAvoidnumber of manufacturing steps
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The oxide semiconductor layer performs multiple functions: serving as the transistor channel and simultaneously as the capacitor electrode. This eliminates the need for additional conductive layers, reducing manufacturing complexity while maintaining full device functionality through proper electrical connection and capacitance formation

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention changes the electrical parameters of the oxide semiconductor layer through doping or plasma treatment to achieve the required conductivity for capacitor electrode functionality, while the same layer maintains its semiconductor properties for transistor operation. This parameter modification allows a single layer to fulfill multiple electrical roles

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS9704894B2Display device including pixel electrode including oxide
Publication Date: 2017.07.11 SEMICON ENERGY LAB CO LTD
  • US9704894B2 patent drawing
  • US9704894B2 patent drawing
  • US9704894B2 patent drawing

AI summary

To provide a display device including a transistor that includes an oxide semiconductor and has favorable characteristics, a pixel electrode electrically connected to the transistor, and a capacitor electrically connected to the pixel electrode. To provide a display device that can be manufactured at low cost. The display device includes a display element including a pixel electrode, a transistor that performs switching of the display element and includes a first oxide semiconductor layer serving as a channel formation region, a capacitor that is electrically connected to the display element and includes a dielectric layer between a pair of electrodes. The pixel electrode is a second oxide semiconductor layer formed on the same surface as that on which the first oxide semiconductor layer is formed, and also serves as one electrode of the capacitor.