Oxide Semiconductor UV Sensor Circuit Reducing Dark Current

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Solution Overview

Problem

Conventional ultraviolet light sensors using silicon photodiodes face limitations in temperature range, reliability, and manufacturing cost due to high dark current and sensitivity to visible light, which restricts their application in portable electronic devices.

Innovation Solution

Employing an oxide semiconductor with a higher band gap, such as IGZO-based, and controlling the gate potential of transistors to prevent threshold voltage shifts, thereby enhancing sensitivity and reliability while reducing manufacturing costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a silicon photodiode is used for ultraviolet light detection, then the sensor can detect ultraviolet light, but the dark current increases significantly with temperature rise, narrowing the usable temperature range

Engineering Contradiction:
Improvetemperature rangeVSAvoiddark current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the fundamental material parameter (band gap) from silicon (1.1 eV) to oxide semiconductor (3.2 eV), which fundamentally alters the temperature dependence of dark current. This parameter change enables operation across a wide temperature range from -40°C to 85°C while maintaining low dark current levels.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs an IGZO-based oxide semiconductor composite material that combines indium oxide, gallium oxide, and zinc oxide in specific ratios. This composite structure provides both the wide band gap for low dark current and the appropriate absorption characteristics for ultraviolet detection.

Inventive Principle:
Principle #40Composite materials

2Measurement precision

If the sensitivity to ultraviolet light is increased by adjusting the silicon photodiode structure, then ultraviolet detection performance improves, but the manufacturing cost increases

Engineering Contradiction:
Improveultraviolet light sensitivityVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent achieves high ultraviolet sensitivity through inherent material properties of oxide semiconductors rather than complex structural modifications. The wide band gap of 3.2 eV naturally provides high sensitivity to ultraviolet light while maintaining simplicity in device structure, thereby reducing manufacturing costs.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If continuous ultraviolet light irradiation is applied to a silicon photodiode, then the sensor can measure ultraviolet doses, but the photodiode degrades and reliability decreases

Engineering Contradiction:
Improvesensor reliabilityVSAvoidservice life under irradiation
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent uses an IGZO-based oxide semiconductor composite that exhibits superior resistance to ultraviolet-induced degradation compared to silicon. The specific composition ratio of In:Ga:Zn = 1:1:1 provides enhanced stability and longevity under continuous ultraviolet irradiation, extending the service life of the sensor.

Inventive Principle:
Principle #40Composite materials

4Measurement precision

If a filter is added to selectively transmit ultraviolet light, then sensitivity to ultraviolet light increases, but the device complexity and manufacturing cost increase

Engineering Contradiction:
Improveultraviolet light selectivityVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent achieves spectral selectivity through the fundamental optical parameter of the oxide semiconductor material itself. The wide band gap of 3.2 eV inherently provides high absorption for ultraviolet light while being transparent to visible light, eliminating the need for additional filter structures and simplifying the overall device design.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables a sensor circuit with increased sensitivity to ultraviolet light, improved reliability, and a wider temperature range of operation, expanding its application in portable electronic devices.

Implementation Method 1

an oxide semiconductor having a higher band gap than silicon, specifically, an IGZO-based oxide semiconductor that contains In, Ga, and Zn, is used for detecting ultraviolet light

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Implementation Method 2

a transistor including a channel formation region in an oxide semiconductor is used, and the amount of off-state current flowing through the transistor during ultraviolet light irradiation is measured

Methodology Applied
Scientific EffectElectrical Conduction: Conduction (electrical)

Data Source

PatentUS9647152B2Sensor circuit and semiconductor device including sensor circuit
Publication Date: 2017.05.09 SEMICON ENERGY LAB CO LTD
  • US9647152B2 patent drawing
  • US9647152B2 patent drawing
  • US9647152B2 patent drawing

AI summary

A sensor circuit includes a transistor comprising an oxide semiconductor; a first circuit which supplies one of a first potential and a second potential; a first switch; a second switch; and a second circuit to which a current flowing between a source and a drain of the transistor is applied via the second switch when the first potential is applied to a gate of the transistor. The first potential is lower than a potential of the source or a potential of the drain of the transistor, and the second potential is higher than the potential of the source or the potential of the drain of the transistor. The first switch electrically connects the source and the drain of the transistor when the second potential is applied to the gate of the transistor, and electrically isolates them when the first potential is applied to the gate of the transistor.