Oxide Particle Sensor Structure for Stable Resistance Detection
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Solution Overview
Problem
Existing sensors face challenges in achieving stable and uniform electrical resistance changes in response to detection targets, leading to inconsistent and inaccurate detection of gases or liquids.
Innovation Solution
The sensor design incorporates a recessed structure with overlapping electrode regions and a first member composed of oxide particles, allowing for uniform distribution and stable electrical resistance changes based on the presence of a detection target, utilizing a recessed structure with overlapping electrode regions and a first member composed of oxide particles, ensuring uniform distribution and stable electrical resistance changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional sensor structure is used, then the device complexity is low, but the measurement precision of electrical resistance changes is poor
Solution Approach 1:
The sensor element is divided into multiple regions (first region and second region) with different depths, creating a recessed structure that segments the oxide particle distribution space. This segmentation allows for controlled oxide particle placement in specific zones, improving electrical resistance detection precision while maintaining manageable structural complexity through systematic regional division.
Solution Approach 2:
Different regions of the sensor element are assigned different properties - the first region has a different depth than the second region, creating localized variations in oxide particle concentration and electrical resistance characteristics. This local quality differentiation enables enhanced detection precision by optimizing specific zones for detection functionality while maintaining overall device coherence.
2Measurement precision
If oxide particles are distributed uniformly, then the measurement precision improves, but the manufacturing precision becomes more difficult to achieve
Solution Approach 1:
The recessed structure is formed in advance during manufacturing, creating predetermined depth variations in the element regions before oxide particle deposition. This preliminary structural preparation guides subsequent oxide particle distribution, enabling uniform electrical resistance characteristics to be achieved more easily during manufacturing by leveraging the pre-formed geometric framework.
Solution Approach 2:
The recessed structure acts as an intermediary framework that mediates between the manufacturing process and the desired uniform oxide particle distribution. By providing a pre-formed geometric template with different depths in different regions, the recessed structure facilitates controlled oxide particle placement, bridging the gap between manufacturing capabilities and precision requirements.
3Stability of the object's composition
If the first region is recessed, then the stability of electrical resistance changes improves, but the device complexity increases
Solution Approach 1:
The element structure is segmented into multiple depth levels with the first region being recessed relative to the second region. This segmentation creates distinct zones for oxide particle distribution that enhance electrical resistance stability by providing controlled particle concentration gradients, while the systematic segmentation approach keeps the increased structural complexity manageable through clear regional differentiation.
Solution Approach 2:
The recessed structure introduces a vertical dimension variation to the otherwise planar element surface. By creating depth differences between the first and second regions, the design adds a third dimension (depth) to control oxide particle distribution and enhance electrical resistance stability, transforming a two-dimensional surface problem into a three-dimensional solution space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables stable and accurate detection of gases or liquids by ensuring uniform distribution of oxide particles, enhancing sensitivity and stability of electrical resistance changes.
Implementation Method 1
stable and accurate detection of gases or liquids by ensuring uniform distribution of oxide particles, enhancing sensitivity and stability of electrical resistance changes
Data Source
AI summary
According to one embodiment, a sensor includes an element portion. The element portion includes an element layer including a first face, a first electrode, a second electrode, and a first member. The first electrode is provided on the first face. The second electrode is provided on the first face. A direction from the second electrode to the first electrode is along a first direction. The first member includes an oxide. The first face includes a first region and a second region. The first region is recessed with respect to the second region. The first region and the second region overlap at least a part of the first electrode in a third direction. At least a part of the first electrode is between the first region and the first member in the third direction.