Oxide Superconductor Filament Grooving via Laser Ablation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for forming a multi-filament structure in rare-earth-based oxide superconducting wires face challenges such as limited groove width reduction, over-etching, and poor insulation resistance due to thermal processing and etching techniques, which affect critical current and peeling of superconducting filaments.

Innovation Solution

The use of an excimer laser with a uniform intensity distribution in the ultraviolet region to form dividing grooves that reach the intermediate layer but not the substrate, ensuring high insulation resistance between filament conductors by covering the groove walls with an insulating coating layer formed from the intermediate and oxide superconducting layer constituents.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If chemical etching is used to form dividing grooves, then the oxide superconducting layer can be divided, but the groove width becomes wider than 100 μm and over-etching occurs

Engineering Contradiction:
Improvegroove width controlVSAvoidcritical current and peeling resistance
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent replaces chemical etching with laser irradiation to form dividing grooves. The laser beam (1030 nm fiber laser or 1064 nm solid-state laser) directly ablates or melts the oxide superconducting layer and metal stabilizing layer to create precise grooves without chemical over-etching, achieving groove widths of 100 μm or less while maintaining clean edges and preventing peeling.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the processing method from chemical to physical (laser) and adjusts laser parameters (wavelength, pulse duration, power, scanning speed) to control groove dimensions. By optimizing these parameters, the groove width is precisely controlled at 100 μm or less, and groove depth is controlled to stop at the intermediate layer without reaching the substrate, eliminating over-etching issues.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If laser irradiation in the far-infrared region (1030 nm) is used to divide the oxide superconducting layer, then dividing grooves can be formed, but thermal processing reduces critical current

Engineering Contradiction:
Improvedivision capabilityVSAvoidcritical current
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent utilizes phase transition (melting and vaporization) of materials under laser irradiation to form dividing grooves. The laser energy causes localized melting and subsequent ejection of molten material, creating clean grooves without excessive thermal diffusion that would damage superconducting properties. The rapid cooling after laser passage prevents thermal degradation.

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The patent employs pulsed laser irradiation instead of continuous laser. The periodic pulse structure allows heat to dissipate between pulses, preventing cumulative thermal damage to the superconducting layer while still achieving effective material removal during each pulse. This pulsed action maintains critical current by limiting thermal exposure.

Inventive Principle:
Principle #19Periodic action

3Reliability

If picosecond laser with Gaussian intensity distribution is used, then thermal processing effect is reduced, but cutting depth is non-uniform and insulation resistance is insufficient

Engineering Contradiction:
Improveinsulation resistanceVSAvoidcutting depth uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent addresses the Gaussian intensity distribution issue by intentionally designing an asymmetric groove profile or using asymmetric scanning strategies. The laser parameters are optimized so that the deeper cut at the center is compensated by controlling the groove shape, or multiple passes are used to achieve uniform effective cutting depth across the groove width, ensuring consistent insulation resistance.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent implements process control through monitoring and adjustment of laser parameters based on observed groove characteristics. By measuring groove depth and width during processing and adjusting laser power, pulse duration, or scanning speed in real-time, uniform cutting depth is achieved across the entire groove region, ensuring adequate insulation resistance between filaments.

Inventive Principle:
Principle #23Feedback

4Manufacturing precision

If multiple laser irradiation operations (20-30 times) are performed to form uniform dividing grooves, then groove uniformity is improved, but productivity decreases

Engineering Contradiction:
Improvegroove uniformityVSAvoidmanufacturing speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent achieves uniform dividing grooves in a single continuous laser irradiation pass by optimizing the laser parameters (power, pulse duration, scanning speed, focal position) from the outset. The continuous action with properly tuned parameters eliminates the need for multiple repeated operations, maintaining groove uniformity while dramatically improving productivity.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The patent performs preliminary optimization of laser processing parameters before actual production. Through pre-experiments, the optimal parameter combination is determined that achieves uniform groove formation in one pass. This preliminary setup ensures that subsequent production runs require minimal repetitions, balancing groove quality with manufacturing efficiency.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves high insulation resistance and maintains the superconducting properties of the oxide superconducting layer, reducing AC loss and improving peel strength by eliminating over-etching and ensuring uniform groove depth, with resistance values exceeding 1 MΩcm between adjacent filaments.

Implementation Method 1

The use of an excimer laser with a uniform intensity distribution in the ultraviolet region to form dividing grooves

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentEP3007180B1Oxide superconductor and method for manufacturing the same
Publication Date: 2018.04.04 SWCC SHOWA CABLE SYST CO LTD
  • EP3007180B1 patent drawingFigure 1
  • EP3007180B1 patent drawingFigure 2
  • EP3007180B1 patent drawingFigure 3~4

AI summary

An oxide superconductor includes: a substrate made of a metal; an insulating intermediate layer provided on the substrate; an oxide superconducting layer provided on the intermediate layer; a metal stabilizing layer provided on the oxide superconducting layer; and a plurality of dividing grooves which divide the metal stabilizing layer and the oxide superconducting layer along a longitudinal direction of the substrate, reach the inside of the intermediate layer through the oxide superconducting layer from the metal stabilizing layer, and do not reach the substrate. The metal stabilizing layer and the oxide superconducting layer are divided to form a plurality of filament conductors by the plurality of dividing grooves, and in each dividing groove of the plurality of dividing grooves, a width of a groove opening portion of the dividing groove is equal to or greater than a width of a groove bottom portion of the dividing groove.