Oxide TFT Display Substrate With Oxygen-Supplying Electrode
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Solution Overview
Problem
Oxide thin film transistors (Oxide TFTs) face performance issues due to oxygen vacancies in the active layer, which are not effectively addressed by existing manufacturing processes, leading to complex procedures and increased energy consumption.
Innovation Solution
A display substrate is designed with an oxygen containing layer and an oxygen supplementing functional layer made of metal oxide materials, where the oxygen supplementing functional layer also serves as an electrode, and oxygen ions are diffused into the active layer through a high temperature treatment process to reduce oxygen vacancies, simplifying the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing manufacturing processes are used to address oxygen vacancies in the active layer, then oxygen vacancies can be reduced, but the manufacturing procedure becomes complex and energy consumption increases
Solution Approach 1:
The patent combines the oxygen supplementing functional layer with the first electrode (pixel electrode, common electrode, or anode) into a single integrated structure. This merging eliminates the need for separate oxygen supplementing layers while maintaining both the electrode function and oxygen supplementation capability, thereby simplifying the manufacturing procedure without compromising TFT performance
Solution Approach 2:
The first electrode is designed to serve dual functions: as the electrical electrode required for display operation and as an oxygen supplementing functional layer. By making the electrode material capable of supplying oxygen (using metal oxide materials), the structure performs multiple functions simultaneously, reducing manufacturing complexity while improving device reliability
2Reliability
If existing manufacturing processes are used to address oxygen vacancies in the active layer, then oxygen vacancies can be reduced, but energy consumption increases
Solution Approach 1:
The oxygen supplementing functional layer is formed during the electrode fabrication process itself, rather than as a separate subsequent step. By incorporating oxygen supplementation capability into the electrode material and formation process, the oxygen supply mechanism is established preliminarily, avoiding additional high-energy treatment steps that would otherwise be required to address oxygen vacancies
Solution Approach 2:
By merging the electrode formation process with the oxygen supplementing layer formation, the patent eliminates the need for separate energy-intensive oxygen treatment processes. The electrode material itself (metal oxide) provides oxygen during normal operation or formation, reducing overall energy consumption while maintaining TFT performance
3Reliability
If separate oxygen supplementing layers and electrodes are used, then oxygen vacancies can be addressed, but the device structure becomes more complex
Solution Approach 1:
The patent merges the oxygen supplementing functional layer and the first electrode into a single integrated structure. The electrode is constructed from metal oxide materials that inherently provide oxygen supplementation, eliminating the need for separate layers and reducing device structural complexity while maintaining TFT performance
Solution Approach 2:
The first electrode is designed with multi-functionality, serving both as the electrical conductor required for display operation and as the oxygen supplementing functional layer. This universal design reduces the number of separate components needed, thereby simplifying the overall device structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces oxygen vacancies in the active layer, improving the overall performance of the TFT and simplifying the manufacturing process by reusing the oxygen supplementing functional layer as an electrode, thereby enhancing the display substrate's performance and efficiency.
Implementation Method 1
oxygen ions are diffused into the active layer through a high temperature treatment process
Implementation Method 2
depositing a metal oxide material on a side of the oxygen containing layer distal to the base substrate to form a metal oxide film by a sputtering deposition process in a sputtering deposition process environment containing oxygen
Data Source
AI summary
The present disclosure provides a display substrate including: a base substrate, and a thin film transistor, an oxygen supplementing functional layer and an oxygen containing layer formed on the base substrate. The thin film transistor includes: an active layer in direct contact with the oxygen containing layer, and the active layer includes an oxide semiconductor material. The oxygen supplementing functional layer includes a metal oxide material and serves as a first electrode of the display substrate. The oxygen containing layer is between the oxygen supplementing functional layer and the base substrate.