Oxide Semiconductor Touch Panel Layout for Simpler Sensor Integration
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Solution Overview
Problem
Current touch panels using silicon semiconductors for transistors in flat panel displays face limitations in terms of complexity and efficiency, particularly in integrating touch sensing functionality with display elements, leading to a need for a simpler and more effective semiconductor device that can incorporate oxide semiconductors for improved conductivity and functionality.
Innovation Solution
A semiconductor device is designed with a transistor, second insulating film, and touch sensor, utilizing In-M-Zn oxide semiconductor films for conductivity, where the second oxide semiconductor film is positioned between the first and second insulating films, and the touch sensor includes electrodes with a third oxide semiconductor film, enabling a conductive and simple structure for touch panel applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If silicon semiconductors are used for transistors in flat panel displays, then the display functionality is achieved, but the device complexity increases and manufacturing efficiency decreases
Solution Approach 1:
The patent combines the transistor channel layer and touch sensor electrode into a single oxide semiconductor film layer. This merging eliminates the need for separate silicon semiconductor layers and separate touch sensor conductive layers, thereby reducing device complexity while maintaining both display and touch sensing functionalities in a unified structure that improves manufacturing efficiency
2Ease of manufacture
If separate silicon semiconductor transistors and touch sensor electrodes are used, then distinct functions are achieved, but the manufacturing process becomes more complex
Solution Approach 1:
The oxide semiconductor film serves multiple functions simultaneously: it acts as the channel layer for transistor operation and as the conductive electrode for touch sensing. This multi-functionality allows a single layer to fulfill both display control and touch detection roles, simplifying the manufacturing process while managing structural complexity through functional integration
3Reliability
If oxide semiconductor films are used for conductivity, then conductivity is enhanced, but the structural complexity increases
Solution Approach 1:
The patent merges the oxide semiconductor film to simultaneously serve as the transistor channel and touch sensor electrode, enhancing conductivity through the inherent properties of oxide semiconductors while avoiding additional structural complexity by eliminating the need for separate conductive layers
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a touch panel with enhanced conductivity and a simplified structure, enabling effective touch sensing and display integration while reducing manufacturing complexity and costs, with improved sensitivity and reliability.
Implementation Method 1
a first oxide semiconductor film that is in contact with the gate insulating film and overlaps with the gate electrode
Data Source
AI summary
A touch panel including an oxide semiconductor film having conductivity is provided. The touch panel includes a transistor, a second insulating film, and a touch sensor. The transistor includes a gate electrode; a gate insulating film; a first oxide semiconductor film; a source electrode and a drain electrode; a first insulating film; and a second oxide semiconductor film. The second insulating film is over the second oxide semiconductor film so that the second oxide semiconductor film is positioned between the first insulating film and the second insulating film. The touch sensor includes a first electrode and a second electrode. One of the first and second electrodes includes the second oxide semiconductor film.