Rare Earth Oxyfluoride Coating for Semiconductor Etching
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Solution Overview
Problem
Yttrium oxide-deposited members used in semiconductor etching steps with fluorine gas experience instability due to surface reactions, while yttrium fluoride coatings have weak corrosion resistance and high particle release in halogen-base gas plasma atmospheres, and yttrium oxyfluoride deposition is challenging due to oxidation issues.
Innovation Solution
A spray material composed of composite particles of rare earth fluoride and rare earth oxide, hydroxide, or carbonate, consolidated together, is plasma sprayed to form a consistent rare earth oxyfluoride-containing layer with minimal process shift and particle release, enhancing corrosion resistance in halogen-base gas plasma.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If yttrium oxide is used as spray material, then corrosion resistance is improved, but process shift occurs due to surface reactions with fluorine gas
Solution Approach 1:
The invention changes the chemical composition parameters of the spray material from pure yttrium oxide to a composite containing rare earth fluoride (5-50 wt%) and rare earth oxide (50-95 wt%). This compositional parameter change allows the formation of rare earth oxyfluoride during plasma spraying, which has lower reactivity with fluorine gas compared to pure yttrium oxide, thereby reducing process shift while maintaining corrosion resistance.
Solution Approach 2:
The invention uses composite spray material consisting of rare earth fluoride and rare earth oxide particles consolidated together. This composite material approach enables the formation of rare earth oxyfluoride on the sprayed layer surface, which combines the advantages of both components: the corrosion resistance from rare earth oxide and the reduced reactivity with fluorine gas from rare earth fluoride, thus resolving the contradiction between corrosion resistance and process stability.
2Stability of the object's composition
If yttrium fluoride is used as spray material, then process shift is reduced, but corrosion resistance deteriorates and particle release increases
Solution Approach 1:
The invention creates a composite spray material where rare earth fluoride (5-50 wt%) is combined with rare earth oxide (50-95 wt%). During plasma spraying, this composite forms rare earth oxyfluoride on the sprayed layer surface. The rare earth oxide component provides the necessary corrosion resistance, while the rare earth fluoride component reduces reactivity with fluorine gas, thus simultaneously achieving both process stability and corrosion resistance that neither material alone can provide.
Solution Approach 2:
The invention modifies the chemical composition parameters by incorporating 5-50 wt% rare earth fluoride in the spray material. This parameter change ensures that during plasma spraying, the rare earth oxyfluoride forms on the sprayed layer surface, which has lower reactivity with fluorine gas compared to pure rare earth fluoride, thereby maintaining process stability while improving corrosion resistance.
3Stability of the object's composition
If yttrium oxyfluoride is deposited directly, then both corrosion resistance and process stability are improved, but deposition consistency deteriorates due to oxidation
Solution Approach 1:
The invention performs preliminary action by pre-mixing rare earth fluoride and rare earth oxide particles to form composite spray material before plasma spraying. This preliminary preparation ensures that both components are uniformly distributed in the spray material, which enables consistent formation of rare earth oxyfluoride during plasma spraying, thereby achieving deposition consistency while maintaining the desired corrosion resistance and process stability.
Solution Approach 2:
The invention uses composite spray material consisting of rare earth fluoride and rare earth oxide particles consolidated together. This composite approach ensures that during plasma spraying, rare earth oxyfluoride is consistently formed on the sprayed layer surface regardless of oxidation conditions, because the starting material already contains both fluoride and oxide components in the correct proportions. This resolves the deposition consistency issue while achieving the desired corrosion resistance and process stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures a stable and corrosion-resistant rare earth oxyfluoride-containing sprayed layer with reduced process shifts and particle release, improving the performance of semiconductor components in halogen-base gas plasma environments.
Implementation Method 1
a sprayed member formed by plasma spraying
Data Source
AI summary
A spray material is defined as composite particles consisting essentially of (A) particles of rare earth fluoride and (B) particles of rare earth oxide, hydroxide or carbonate, consolidated together. The spray material is plasma sprayed onto a substrate to form a sprayed layer containing rare earth oxyfluoride in a consistent manner while minimizing the process shift and releasing few particles. The sprayed member has improved corrosion resistance to halogen-based gas plasma.