Oxygen Removal Piping Layout for Accurate Semiconductor Detection
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Solution Overview
Problem
Existing oxygen removal systems in semiconductor manufacturing have inaccurate detection results, leading to false alarms and premature aging of oxygen sensors due to high oxygen concentrations in the detection device.
Innovation Solution
A semiconductor device with a switching ball valve system that directs gas flow through different pipes during oxygen removal and detection stages, preventing high oxygen concentrations from reaching the oxygen sensor and ensuring accurate detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the oxygen detection device continuously monitors oxygen concentration during the oxygen removal process, then the oxygen concentration can be accurately controlled, but the oxygen sensor will be exposed to high oxygen concentrations causing false alarms and premature aging
Solution Approach 1:
The system performs preliminary oxygen removal through the first and second pipes before activating the oxygen sensor. The switching ball valve initially directs gas flow away from the third pipe containing the sensor, allowing oxygen concentration to decrease to safe levels before the sensor begins monitoring, thus preventing damage while enabling subsequent accurate measurement
Solution Approach 2:
The switching ball valve dynamically changes the gas flow path based on the oxygen removal stage. During initial oxygen removal, it directs flow through the first and second pipes; when oxygen concentration reaches a first threshold, it switches to direct flow through the third pipe to the sensor, enabling adaptive protection and measurement
2Device complexity
If the oxygen removal system uses a simple single-pipe configuration, then the device complexity is reduced, but it cannot prevent high oxygen concentration gas from reaching the sensor causing false alarms
Solution Approach 1:
The oxygen detection device is segmented into three parallel pipes: the first pipe for initial oxygen removal, the second pipe as an alternative pathway, and the third pipe for sensor monitoring. This segmentation allows the system to separate the oxygen removal function from the detection function, preventing high oxygen concentration gas from reaching the sensor while maintaining relatively simple individual pipe structures
Solution Approach 2:
The switching ball valve acts as an intermediary device that controls gas flow distribution between different pipes. It mediates between the oxygen removal process and the oxygen sensor, directing gas flow appropriately at different stages to prevent sensor exposure to high oxygen concentrations while enabling accurate measurement when conditions are safe
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents false alarms and extends the lifespan of oxygen sensors by accurately managing gas flow, ensuring reliable oxygen concentration measurements in the semiconductor process cavity.
Implementation Method 1
the switching ball valve being constructed in such a way that the switching ball valve communicates the first pipe with the second pipe in an oxygen removal stage and communicates the first pipe with the third pipe in an oxygen detection stage
Implementation Method 2
more negative ions are adsorbed on the side where the atmosphere is communicated than the side where the machine pipe is located, so that an electromotive force is produced by the difference in concentration between ions on two sides
Implementation Method 3
negatively charged oxygen ions are adsorbed onto inner and outer surfaces of zirconium oxide under the catalysis of platinum
Implementation Method 4
negatively charged oxygen ions are adsorbed onto inner and outer surfaces of zirconium oxide under the catalysis of platinum
Data Source
AI summary
The present invention discloses a semiconductor device and an oxygen removal method thereof. The semiconductor device comprises: a process cavity, an oxygen removal pipe and an oxygen detection device, wherein the oxygen detection device comprises an oxygen detection pipe, a switching ball valve and an oxygen sensor; the oxygen detection pipe comprises a first pipe, a second pipe and a third pipe which are arranged in parallel and all connected to the oxygen removal pipe and the switching ball valve; the oxygen sensor is arranged on the third pipe; and, the switching ball valve is constructed in such a way that the switching ball valve communicates the first pipe with the second pipe in an oxygen removal stage and communicates the first pipe with the third pipe in an oxygen detection stage.