Ozonated Water Delivery System Using Carbon Dioxide Mediator

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Solution Overview

Problem

Existing ozonated water delivery systems struggle to achieve high ozone concentrations above 50 ppm in ultrapure water, and they face challenges with ozone decay due to reactivity with deionized ultrapure water and the presence of impurities.

Innovation Solution

The proposed ozonated water delivery system includes a contacting device in communication with an ultrapure water source, where a mixed gas containing ozone, carbon dioxide, and oxygen is used to form an aqueous carbon dioxide solution, which delays ozone decay and allows for higher ozone concentrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If ozone is dissolved in deionized ultrapure water to achieve high ozone concentrations, then the ozone concentration increases, but the rate of ozone decay increases

Engineering Contradiction:
Improveozone concentrationVSAvoidozone stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent introduces carbon dioxide as an intermediary substance that mediates between ozone and water. The carbon dioxide forms carbonic acid which lowers pH and suppresses hydroxyl radical formation, thereby reducing ozone decay while allowing high ozone concentrations to be maintained in the water

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If carbon dioxide concentration is increased to suppress ozone decay, then ozone stability improves, but the mass transfer efficiency decreases

Engineering Contradiction:
Improveozone stabilityVSAvoidmass transfer efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent changes the pH parameter of the water by controlling carbon dioxide dissolution. By adjusting pH to be below 7, the system suppresses ozone decay kinetics while maintaining efficient mass transfer. This parameter change allows the system to achieve both ozone stability and mass transfer efficiency

Inventive Principle:
Principle #35Parameter changes

3Productivity

If a packed column contacting device is used to increase mass transfer efficiency, then the ozone dissolution efficiency improves, but the work area required increases

Engineering Contradiction:
Improvemass transfer efficiencyVSAvoidwork area
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent changes the chemical parameter (pH) of the water to suppress ozone decay, which allows for more compact equipment design. By controlling the chemical environment to reduce ozone loss, the system achieves high mass transfer efficiency in a smaller contacting device with reduced work area requirements

Inventive Principle:
Principle #35Parameter changes

4Productivity

If membrane modules are used to dissolve gases into ultrapure water, then the gas dissolution efficiency improves, but the membrane materials are degraded by oxidizing agents

Engineering Contradiction:
Improvegas dissolution efficiencyVSAvoidmembrane durability
Core Design Contradiction:
ProductivityVSStrength

Solution Approach 1:

The patent applies preliminary anti-action by introducing carbon dioxide to lower the pH before ozone dissolution occurs. This preliminary chemical modification prevents the formation of hydroxyl radicals that would otherwise degrade the membrane materials, thereby protecting the membrane while maintaining gas dissolution efficiency

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system effectively provides ultrapure water with ozone concentrations greater than 50 ppm, maintaining stability and reducing ozone decay, even at varying flow rates, thereby enhancing the efficiency and reliability of ozonated water delivery.

Implementation Method 1

Some carbon dioxide (CO2) within the gas mixture converts into carbonic acid which lowers the concentration of the hydroxide ion

Methodology Applied
Scientific EffectCarbon dioxide dissolution and carbonic acid formation: Solvation

Implementation Method 2

The carbonate ions scavenge hydroxyl radicals which effectively lowers the rate of decay of dissolved ozone in ultrapure water

Methodology Applied
Scientific EffectRadical scavenging: Oxidation

Implementation Method 3

the gas mixture from gas source 9 is contacted within the contacting device 3 with the ultrapure water from the UPW source 5 using a countercurrent flow thereby resulting in some portion of ozone from the gas source 9 dissolving in the ultrapure water

Methodology Applied
Scientific EffectGas dissolution: Absorption (physical)

Data Source

PatentEP3814284B1Ozonated water delivery system and method of use
Publication Date: 2025.06.04 MKS INSTR INC
  • EP3814284B1 patent drawingFigure 1
  • EP3814284B1 patent drawingFigure 2
  • EP3814284B1 patent drawingFigure 3

AI summary

The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.