Ozonated Water Recirculation via Gas Purging and Re-dissolution
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Solution Overview
Problem
Current systems for ozonated deionized water (DIO3) in the semiconductor industry are wasteful and expensive due to the instability of ozone, which decays quickly, leading to inefficient and costly continuous flow systems that fail to effectively recirculate and reuse ozonated liquids.
Innovation Solution
A system and method for recirculating ozonated liquid using a contactor with multiple inlets and outlets, a centrifugal pump, and a destruct component that purges unwanted gases, allowing for continuous recirculation and reuse of ozonated deionized water while minimizing waste, using a compact vessel and off-gas reclamation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a constant flow system is used to address ozone decay, then the stability of ozonated water is improved, but operational cost increases and waste is generated
Solution Approach 1:
The system recovers ozonated water that would otherwise be discarded by capturing off-gas containing ozone and re-dissolving it into the liquid stream. This recovery process eliminates waste while maintaining stability, as the off-gas reclamation continuously replenishes ozone without requiring constant fresh ozonated water generation.
Solution Approach 2:
The system employs a feedback mechanism where off-gas from the ozonated water system is captured and fed back into the liquid phase through the contactor. This closed-loop feedback maintains ozone concentration and stability while eliminating the need for wasteful continuous flow replacement.
2Stability of the object's composition
If a constant flow system is used to address ozone decay, then the stability of ozonated water is improved, but operational cost increases
Solution Approach 1:
The system recovers value from off-gas that would otherwise be wasted, converting it back into useful ozonated water. This recovery eliminates the need for continuous expensive ozonation and flow operations, significantly reducing operational costs while maintaining stability.
Solution Approach 2:
The system converts the harmful off-gas emission into a beneficial resource by re-dissolving the ozone into the liquid phase. This transforms waste into value, reducing operational costs while maintaining the stability of ozonated water.
3Object-affected harmful factors
If off-gas is purged from the system, then gas accumulation is prevented, but potential resource loss occurs
Solution Approach 1:
The system converts the potentially harmful off-gas into a beneficial resource by re-dissolving the ozone into the liquid phase through the contactor. This eliminates gas accumulation risks while preventing ozone loss, transforming waste into value.
Solution Approach 2:
The contactor serves as an intermediary device that facilitates the transfer of ozone from the gas phase to the liquid phase. This intermediary process prevents both gas accumulation and ozone loss by providing a controlled re-dissolution pathway.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces operational costs, minimizes waste, and enables continuous, efficient recirculation of ozonated deionized water by purging unwanted gases and using off-gas for secondary purposes, providing a stable and cost-effective solution for semiconductor manufacturing processes.
Implementation Method 1
the contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet
Implementation Method 2
Another advantage of the invention is that it can use a particle free pump (e.g., a centrifugal pump)
Data Source
Figure 1A
Figure 1B
Figure 2A
AI summary
The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure.