Ozone-Assisted Laser Sustained Plasma Ignition Without Electrodes

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Solution Overview

Problem

Current laser sustained plasma (LSP) lamps face challenges in igniting and maintaining plasma due to the presence of oxygen, which causes severe oxidation and complicates the alignment and maintenance of the illumination system, especially when using electrodes.

Innovation Solution

A system and method that utilize an ozone generation unit with illumination sources to convert diatomic oxygen (O2) into triatomic oxygen (O3) within a gas containment vessel, where the energy from the illumination sources is absorbed by triatomic oxygen to ignite and sustain the plasma, eliminating the need for electrodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If electrodes are used to ignite plasma in LSP lamps, then plasma ignition is achieved, but severe oxidation occurs during lamp operation

Engineering Contradiction:

Improveplasma ignitionVSAvoidoxidation

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent removes electrodes from the LSP lamp system entirely, extracting the harmful element that causes oxidation. Plasma ignition is achieved through direct laser heating of oxygen molecules in the gas fill, eliminating the need for electrode-based ignition and subsequent oxidation problems.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the mechanical/electrical electrode system with an optical field-based ignition mechanism. The laser beam directly heats and ionizes the gas through electromagnetic radiation absorption, substituting physical electrode contact with non-contact optical energy transfer.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If electrodes are used in LSP lamps, then plasma ignition is possible, but alignment and maintenance complexity increases

Engineering Contradiction:

Improveplasma ignitionVSAvoidalignment and maintenance

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent removes electrodes and all associated alignment components from the system. Without electrodes, there are no electrode positions to align, no gaps to maintain, and no mechanical components requiring calibration, thereby eliminating alignment and maintenance complexity.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The laser beam serves dual functions: it ignites the plasma and sustains it during operation. The same optical component (laser) that provides ignition continues to provide energy sustainment, eliminating the need for separate ignition systems and reducing overall system complexity.

Inventive Principle:

Principle #25Self-service

3Object-affected harmful factors

If oxygen is excluded from LSP lamp gas fill, then oxidation is prevented, but the gas mixture composition is limited

Engineering Contradiction:

Improveoxidation preventionVSAvoidgas mixture composition

Core Design Contradiction:

Object-affected harmful factorsVSAdaptability or versatility

Solution Approach 1:

The patent converts oxygen from a harmful element that causes electrode oxidation into a beneficial component of the gas fill. By using direct laser heating of oxygen molecules for plasma ignition, oxygen becomes the medium through which ignition occurs, allowing oxygen-containing gas mixtures to be used without electrode damage.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the threshold power required for plasma ignition, allows for the inclusion of oxygen in the gas mixture, and enhances the stability and maintainability of the LSP lamps by avoiding electrode-related issues, thereby improving the efficiency and reliability of the illumination system.

Implementation Method 1

one or more illumination sources configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3)

Methodology Applied

Scientific EffectPhotodissociation: Photodissociation

Implementation Method 2

the plasma is ignited via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen

Methodology Applied

Scientific EffectAbsorption of electromagnetic radiation: Absorption (EM radiation)

Data Source

PatentUS11844172B2System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources

Publication Date: 2023.12.12 KLA CORP

AI summary

An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.