Ozone Concentrator Pressure Control for Stable Gas Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing ozone concentrators face challenges in stabilizing the pressure and flow rate of ozone gas supply, leading to fluctuations and inefficiencies in ozone delivery for substrate processing.
Innovation Solution
The proposed ozone concentrator includes a pump, a flow rate controller, and a pressure controller that adjusts the pressure of the supply passage to a set pressure, ensuring stable primary and secondary pressures and flow rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a pump is used to supply ozone gas, then the flow rate can be controlled, but pressure fluctuations occur in the supply passage
Solution Approach 1:
The patent employs a pressure controller that continuously monitors the pressure in the supply passage and adjusts the pump operation accordingly. When pressure deviates from the setpoint, the controller modifies pump runtime or speed to restore stable pressure, creating a closed-loop feedback system that resolves the contradiction between flow rate control and pressure stability.
Solution Approach 2:
The patent implements dynamic pressure control by allowing the pump to operate at variable speeds rather than fixed speed. The pump speed is continuously adjusted based on real-time pressure feedback, enabling the system to adapt to changing conditions and maintain both flow rate and pressure stability simultaneously.
2Productivity
If the pump operates at high speed to increase flow rate, then ozone supply increases, but pressure fluctuations worsen
Solution Approach 1:
The patent uses variable speed pump operation where the pump speed is dynamically adjusted based on pressure feedback. Instead of operating at fixed high speed, the pump speed is modulated to maintain optimal pressure levels while delivering required flow rates, resolving the contradiction between productivity and reliability.
Solution Approach 2:
The pressure controller continuously monitors pressure and provides feedback to adjust pump speed accordingly. When pressure fluctuates due to high-speed operation, the feedback mechanism reduces speed to stabilize pressure, ensuring reliable operation even at high flow rates.
3Productivity
If pressure is increased to improve flow rate control, then flow rate stability improves, but energy consumption increases
Solution Approach 1:
The patent implements dynamic pressure control where the pump operates at variable speeds rather than constant high speed. The pump speed is adjusted to maintain the minimum necessary pressure for stable flow rate control, reducing energy consumption while achieving the same flow rate stability that would otherwise require excessive pressure.
Solution Approach 2:
The patent changes the operating parameters of the pump by varying speed rather than maintaining fixed high pressure. This parameter change allows the system to achieve flow rate control stability through optimized pressure regulation rather than excessive pressure, thereby reducing energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables stabilized flow rate control and reduced pressure fluctuations, improving the efficiency and reliability of ozone gas supply to the processor, thereby enhancing the substrate processing performance.
Implementation Method 1
a pump provided in a supply passage through which an ozone gas flows
Implementation Method 2
a pressure controller configured to control a pressure of the supply passage between the pump and the flow rate controller to a set pressure
Implementation Method 3
a flow rate controller provided in the supply passage downstream of the pump
Data Source
AI summary
An ozone concentrator includes: a pump provided in a supply passage through which an ozone gas flows; a flow rate controller provided in the supply passage downstream of the pump; and a pressure controller configured to control a pressure of the supply passage between the pump and the flow rate controller to a set pressure.