Ozone Dissolution Supply Apparatus Flow Control

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Solution Overview

Problem

Conventional ozone dissolution supply apparatuses consume excessive ultrapure water and struggle to maintain stable ozone concentration due to ozone decomposition during circulation, leading to inefficient use and increased waste.

Innovation Solution

A gas dissolution supply apparatus with a gas supply unit, liquid supply unit, gas dissolving unit, storage tank, flow rate measurement unit, pressure adjustment unit, and flow rate adjustment unit, which measures and adjusts flow rates to conserve raw materials and maintain constant ozone concentration by recycling unused ozone dissolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the ozone dissolution production apparatus constantly produces the ozone dissolution to meet the demand from the washing apparatus, then the required ozone concentration and flow rate are maintained, but excessive ozone dissolution is supplied and ultrapure water is wasted

Engineering Contradiction:
Improveozone concentration stabilityVSAvoidultrapure water consumption
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The system employs a flow rate measurement unit to monitor the flow rate of returned ozone dissolution and uses this information to adjust the liquid supply flow rate through a flow rate adjustment unit. This feedback mechanism ensures that ultrapure water is supplied only when needed, maintaining reliable ozone concentration while preventing water waste.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically changes the liquid supply flow rate parameter based on measured return flow rate conditions. When the return flow rate is low (indicating high demand), the liquid supply flow rate is increased; when the return flow rate is high (indicating low demand), the liquid supply flow rate is decreased or stopped, optimizing water usage while maintaining performance.

Inventive Principle:
Principle #35Parameter changes

2Loss of substance

If the ozone dissolution is circulated to reduce ultrapure water usage, then water consumption is reduced, but the ozone concentration decreases due to decomposition during circulation

Engineering Contradiction:
Improveultrapure water consumptionVSAvoidozone concentration
Core Design Contradiction:
Loss of substanceVSStability of the object's composition

Solution Approach 1:

The flow rate measurement unit continuously monitors the return flow rate, providing feedback on circulation conditions. This enables the flow rate adjustment unit to modify the liquid supply flow rate in response to circulation status, maintaining ozone concentration stability while enabling water reduction through circulation.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system supplies liquid in excess of the minimum required amount during circulation, then adjusts down based on feedback. This ensures that even though some ozone decomposes during circulation, sufficient ozone concentration is maintained while still achieving water conservation benefits from circulation.

Inventive Principle:
Principle #16Partial or excessive action

3Stability of the object's composition

If the liquid supply flow rate is increased to maintain ozone concentration, then the concentration stability is improved, but the ultrapure water consumption increases

Engineering Contradiction:
Improveozone concentrationVSAvoidultrapure water consumption
Core Design Contradiction:
Stability of the object's compositionVSLoss of substance

Solution Approach 1:

The liquid supply flow rate is made dynamic rather than fixed. The flow rate adjustment unit continuously adapts the liquid supply flow rate based on real-time measurements of return flow rate, allowing the system to maintain ozone concentration stability while minimizing water consumption by supplying liquid only when and where needed.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system changes the liquid supply flow rate parameter dynamically based on operating conditions. By adjusting this parameter in response to measured return flow rates, the system achieves concentration stability without the excessive water consumption that would result from a constantly high flow rate.

Inventive Principle:
Principle #35Parameter changes

4Productivity

If the ozone dissolution supply is stopped and restarted frequently to match washing process needs, then the washing process efficiency is improved, but the rise time delays the response and excessive supply occurs

Engineering Contradiction:
Improvewashing process efficiencyVSAvoidrise time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The flow rate measurement unit provides continuous feedback on the return flow rate, enabling the system to respond dynamically to washing process demands without stopping. This allows the washing process to maintain high efficiency while the system adjusts liquid supply in real-time, eliminating rise time delays associated with frequent stop-start cycles.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system maintains continuous operation of the ozone dissolution production apparatus, avoiding stop-start cycles. By continuously producing ozone dissolution and using feedback control to adjust liquid supply based on return flow rate, the system eliminates rise time delays while preventing excessive supply through intelligent flow rate adjustment.

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively reduces ultrapure water usage and stabilizes ozone concentration in the ozone dissolution supply, optimizing the use of ozone gas and minimizing waste by continuously monitoring and adjusting flow rates and pressures.

Implementation Method 1

a gas dissolving unit that dissolves the gas supplied from the gas supply unit in the liquid supplied from the liquid supply unit to produce the gas dissolution

Methodology Applied
Scientific EffectGas dissolution: Absorption (physical)

Implementation Method 2

a flow rate measurement unit that measures a flow rate of the gas dissolution returned to the gas dissolving unit, the flow rate measurement unit being provided on the return pipe

Methodology Applied
Scientific EffectFlow rate measurement:

Implementation Method 3

a pressure adjustment unit that keeps a pressure in the supply pipe constant, the pressure adjustment unit being provided on the return pipe

Methodology Applied
Scientific EffectPressure regulation:

Implementation Method 4

ozone decomposes by itself, and therefore, a problem can arise that the ozone concentration decreases during circulation

Methodology Applied
Scientific EffectOzone decomposition: Decomposition (biological)

Data Source

PatentUS11352274B2Gas dissolution supply apparatus and gas dissolution supply method
Publication Date: 2022.06.07 EBARA CORP
  • US11352274B2 patent drawing
  • US11352274B2 patent drawing
  • US11352274B2 patent drawing

AI summary

A gas dissolution supply apparatus dissolves a gas supplied from a gas supply unit in a liquid supplied from a liquid supply unit to produce a gas dissolution in a gas dissolving unit, stores the gas dissolution produced in the gas dissolving unit in a gas dissolution tank, supplies the gas dissolution from the gas dissolution tank to a point of use, measures the flow rate of a part of the gas dissolution supplied to the point of use that is returned to the gas dissolving unit, and adjusts the flow rate of the liquid supplied from the liquid supply unit to the gas dissolving unit based on the result of the measurement.