Ozone Process Fluid Recirculation for Substrate Exhaust Decomposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current substrate processing technologies face challenges in effectively processing substrates with ozone-containing process fluids, particularly in achieving high etching selectivity and etch rates during etching and cleaning processes, and in efficiently decomposing ozone residues.
Innovation Solution
A substrate processing apparatus and ozone decomposition method that involve a process fluid treating apparatus with a housing, injection nozzle, gas supply conduit, and circulation line, which injects and circulates ozone-containing process fluids to enhance ozone decomposition using turbulence and oxygen gas, facilitating efficient substrate processing and ozone removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If ozone-containing process fluid is used for substrate processing, then etching selectivity and etch rate are improved, but ozone decomposition efficiency deteriorates
Solution Approach 1:
The patent extracts ozone from the process fluid using a separate extraction unit after the substrate processing chamber. This allows the etching process to utilize ozone-containing fluid for high productivity while the extraction unit removes ozone residues, preventing harmful effects from accumulating in the system.
Solution Approach 2:
The patent introduces an intermediary substance (such as activated carbon or catalyst) in the extraction unit that facilitates ozone decomposition. This intermediary enables the separation of etching function (performed by ozone) from harmful residue (removed by intermediary), resolving the contradiction between etching efficiency and ozone residue management.
2Productivity
If ozone is used in process fluid, then cleaning effectiveness is improved, but decomposition difficulty increases
Solution Approach 1:
The patent designs the extraction unit to utilize the existing process fluid flow and chamber environment to facilitate ozone decomposition. The system leverages natural processes such as contact with chamber surfaces or integration with existing exhaust systems, reducing the need for additional complex decomposition equipment while maintaining effective cleaning.
3Speed
If process fluid is discharged directly, then processing speed is maintained, but ozone environmental impact worsens
Solution Approach 1:
The patent implements preliminary ozone removal in the extraction unit before the process fluid is discharged from the system. This preliminary action decomposes a significant portion of ozone residues, allowing rapid processing to continue while minimizing environmental impact of the discharged fluid.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively processes substrates with high etching selectivity and etch rates while efficiently decomposing ozone, improving the overall efficiency and effectiveness of substrate processing and reducing ozone residues.
Implementation Method 1
The circulation line may have a turbulence creating part therein to allow the process fluid flowing through the circulation line to become turbulent.
Implementation Method 2
The process fluid treating apparatus may further include a gas supply conduit that supplies gas including oxygen into the inner space of the housing.
Implementation Method 3
A pump may be located on the circulation line.
Implementation Method 4
A heater may be located on the circulation line.
Data Source
AI summary
Disclosed are a substrate processing apparatus and a process fluid treating apparatus. The substrate processing apparatus includes a process chamber that processes a substrate with a process fluid including ozone, a discharge conduit connected to the process chamber to discharge the process fluid used to process the substrate, and a process fluid treating apparatus connected with the discharge conduit. The process fluid treating apparatus includes a housing having an inner space with a set volume in which the process fluid is received and an injection nozzle connecting the discharge conduit and the inner space of the housing.