Ozone Heating Organic Residue Removal Charged Particle Beam Column

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Solution Overview

Problem

Organic residue accumulation in charged particle beam systems causes charging issues and degrades system performance due to outgassing from insulating materials and samples during operation.

Innovation Solution

A system comprising a conduit for adding ozone to the beam column, a heater to increase temperature, and a pump to remove the byproducts of the chemical reaction between ozone and organic residue, facilitating the dissociation and removal of organic residue.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If insulating materials and samples are used in the charged particle beam system, then the system can operate with proper electrical insulation and sample handling, but organic residue accumulates on surfaces over time causing charging issues and performance degradation

Engineering Contradiction:

Improvesystem functionalityVSAvoidorganic residue accumulation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent converts the harmful organic residue into a removable byproduct by introducing oxygen that reacts with the carbon and hydrogen in the residue to form carbon dioxide and water vapor, which can then be pumped away. This transforms the persistent harmful contamination into a transient removable gas phase product.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent introduces oxygen into the vacuum chamber to oxidize the organic residue on surfaces. The oxygen reacts with carbon and hydrogen in the residue to form carbon dioxide and water, effectively removing the harmful organic deposits through chemical oxidation.

Inventive Principle:

Principle #38Strong oxidants (Accelerated oxidation)

2Productivity

If oxygen is introduced to oxidize organic residue at room temperature, then the chemical reaction can proceed, but the reaction rate is slow and inefficient for practical cleaning

Engineering Contradiction:

Improveresidue removal rateVSAvoidheating energy consumption

Core Design Contradiction:

ProductivityVSUse of energy by stationary object

Solution Approach 1:

The patent changes the temperature parameter of the environment to accelerate the oxidation reaction. By heating the chamber to elevated temperatures, the reaction rate between oxygen and organic residue increases dramatically, making the cleaning process practical and efficient despite the additional energy input.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent employs a periodic cycle where oxygen is introduced, heating is applied to accelerate reaction, then the oxygen is removed and the chamber is pumped down. This periodic approach allows efficient residue removal while managing energy consumption by not maintaining high temperature continuously.

Inventive Principle:

Principle #19Periodic action

3Quantity of substance

If the chamber is pumped continuously to maintain vacuum, then vacuum quality is maintained, but the pumping speed is limited and cannot keep up with rapid outgassing during operation

Engineering Contradiction:

Improvevacuum qualityVSAvoidpumping speed

Core Design Contradiction:

Quantity of substanceVSSpeed

Solution Approach 1:

The patent extracts the problematic organic materials from the vacuum environment by converting them into gas phase products (carbon dioxide and water vapor) that can be efficiently removed by the pump. This extraction approach allows the pump to handle the removed materials without being overwhelmed during the cleaning process.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively removes organic residue by accelerating ozone dissociation into reactive oxygen species that oxidize and bond with carbon and hydrogen residues, restoring the vacuum environment and improving system functionality.

Implementation Method 1

The ozone dissociates into stable oxygen molecules and oxygen free radicals

Methodology Applied

Scientific EffectDissociation: Photodissociation

Implementation Method 2

the radicals react with the carbon and hydrogen of the organic residue

Methodology Applied

Scientific EffectOxidation: Oxidation

Implementation Method 3

A heater is coupled to the column and is for increasing the temperature in the column

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 4

A pump is coupled to the column and is for removing a gas from the chamber

Methodology Applied

Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentUS8092641B1System and method for removing organic residue from a charged particle beam system

Publication Date: 2012.01.10 ASML NETHERLANDS BV

AI summary

A system and method for removing an organic residue from a charged particle beam system includes a conduit that is coupled to the column and is for adding oxygen to the column. A heater is coupled to the column and is for increasing the temperature in the column. A pump is coupled to the column and is for removing a gas from the chamber, wherein the gas is a byproduct of a chemical reaction of the organic residue and the oxygen.