Ozone Supply Pressure Control for Stable Concentration Output

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing ozone supply apparatuses using adsorbent-based ozone concentration and supply methods struggle to stably maintain a target ozone concentration due to fluctuations caused by changes in measurement performance of ozone concentration meters over time.

Innovation Solution

An ozone supply apparatus that includes an ozone generator, adsorption tower, decompression circuit, dilution circuit, flow meters, and a control device to estimate ozone concentration based on pressure measurements, adjusting the dilution air flow rate to stabilize the ozone concentration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If an ozone concentration meter is used to measure and control ozone concentration, then the ozone concentration can be monitored, but the measurement performance changes over time causing unstable target concentration supply

Engineering Contradiction:
Improveozone concentration measurementVSAvoidstable supply of target ozone concentration
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent introduces pressure as an intermediary parameter to indirectly estimate ozone concentration. Instead of directly measuring ozone concentration with a deteriorating meter, the system measures pressure (which remains stable) and uses it as a mediator to calculate the desired ozone concentration through the relationship: desired concentration = (measured pressure / reference pressure) × reference concentration. This eliminates reliance on the deteriorating ozone concentration meter while maintaining measurement capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the chemical/optical measurement system (ozone concentration meter) with a mechanical measurement system (pressure gauge). Pressure gauges are more reliable and stable over time compared to ozone concentration meters, which deteriorate due to exposure to ozone. By substituting the measurement mechanism, the system achieves long-term reliability while maintaining the ability to control ozone concentration.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Quantity of substance

If a decompression mechanism operates at high vacuum to concentrate ozone, then ozone concentration increases, but the ozone concentration fluctuates during the desorption process

Engineering Contradiction:
Improveozone concentrationVSAvoidozone concentration stability
Core Design Contradiction:
Quantity of substanceVSStability of the object's composition

Solution Approach 1:

The patent performs preliminary measurement of pressure during the desorption process and uses this information to calculate the desired ozone concentration before actual ozone supply. By anticipating the concentration changes based on pressure variations, the system can adjust the dilution air flow rate in advance to maintain stable output concentration throughout the desorption process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements a feedback control system where the measured pressure is continuously used to calculate the desired ozone concentration, and the dilution air flow rate is adjusted based on this calculation. The control unit monitors pressure changes and dynamically adjusts the dilution air flow to compensate for concentration fluctuations, ensuring stable ozone supply throughout the desorption process.

Inventive Principle:
Principle #23Feedback

3Quantity of substance

If ozone concentration is increased in the adsorption tower, then more ozone can be stored, but the vacuum pump becomes corrosive and requires frequent maintenance

Engineering Contradiction:
Improvestored ozone amountVSAvoidvacuum pump corrosion
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The patent applies partial action by introducing dilution air into the decompression circuit to mix with the concentrated ozone gas. This dilutes the high-concentration ozone before it reaches the vacuum pump, reducing the corrosive effect on the pump while still maintaining the ability to store and retrieve large amounts of ozone in the adsorption tower. The system achieves the benefit of high storage capacity without the full harm of high-concentration ozone exposure to the vacuum pump.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Stable supply of ozone gas at a target concentration is achieved by reducing reliance on ozone concentration meters and using pressure-based estimation, minimizing maintenance costs and preventing vacuum pump corrosion.

Implementation Method 1

an adsorption tower (7) in which an adsorbent (7a) that adsorbs the ozone gas is installed

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

a decompression mechanism (12) that discharges, from a discharge port (122), gas sucked from a suction port (121)

Methodology Applied
Scientific EffectPressure difference: Pressure Gradient

Data Source

PatentEP4714901A1Ozone supply device and ozone supply method
Publication Date: 2026.03.25 MITSUBISHI ELECTRIC CORP
  • EP4714901A1 patent drawingFigure 1
  • EP4714901A1 patent drawingFigure 2~3
  • EP4714901A1 patent drawingFigure 4

AI summary

An ozone supply apparatus (100) includes an ozone pipe (10) connecting an ozone generator (6) and an adsorption tower (7); a decompression circuit (30) including a vacuum pump (12) discharging gas sucked from a suction port (121) from a discharge port (122), a primary pipe (15) connecting the suction port (121) to the ozone pipe (10), and a secondary pipe (19) connected to the discharge port (122), and sucking ozone gas desorbed from an adsorbent (7a) from inside of the adsorption tower (7); a dilution circuit (40) mixing dilution air into ozone gas flowing through the decompression circuit (30); a first flow meter (14) installed in the decompression circuit (30); a second flow meter (16) and a flow rate adjustment valve (17) installed in the dilution circuit (40); a pressure gauge (13) installed in the adsorption tower (7); and a control device (18) adjusting an opening degree of the flow rate adjustment valve (17) such that an estimated value of the ozone concentration of ozone gas discharged from the vacuum pump (12) to the secondary pipe (19) becomes a target value.