Ozone Sensor Abnormality Detection via Discharge Power Correlation
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Solution Overview
Problem
Existing ozone gas concentration detection methods are unreliable when the ozone sensor does not function normally, leading to frequent and difficult maintenance requirements, which can result in inaccurate ozone gas supply and decreased performance in substrate processing.
Innovation Solution
A substrate processing apparatus and method that includes an ozonizer, ozone sensor, monitor unit, and control unit to detect abnormalities in ozone gas concentration by correlating monitored ozone gas concentration with discharge power, allowing for accurate detection of sensor malfunctions and prompt maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If ozone sensor is used to determine device state, then ozone gas concentration can be detected, but maintenance frequency increases and reliability decreases when sensor malfunctions
Solution Approach 1:
The control unit continuously monitors the relationship between discharge power and ozone gas concentration, using feedback from both parameters to detect sensor abnormalities. When the sensor output deviates from the expected correlation with discharge power, the system identifies sensor malfunction and adjusts accordingly, maintaining reliable operation despite sensor degradation.
Solution Approach 2:
The invention uses discharge power as an intermediary parameter to verify sensor readings. By comparing sensor output against the known relationship with discharge power, the system can detect when the sensor is malfunctioning without requiring direct manual intervention, thus resolving the reliability issue while maintaining measurement capability.
2Reliability
If regular maintenance is performed frequently, then sensor reliability is maintained, but productivity and operational continuity decrease
Solution Approach 1:
The system performs preliminary detection of sensor abnormalities by continuously monitoring the correlation between discharge power and ozone concentration. By detecting issues before they cause complete sensor failure, the system can schedule maintenance at optimal times rather than requiring frequent preventive maintenance, thus maintaining reliability while minimizing operational disruption.
Solution Approach 2:
The control unit automatically monitors sensor health and detects abnormalities without requiring manual intervention or frequent scheduled maintenance. The system serves itself by identifying when maintenance is needed based on actual sensor performance rather than predetermined schedules, thereby maintaining reliability while maximizing operational continuity.
3Ease of operation
If ozone sensor is used without verification, then device operation is simplified, but measurement accuracy deteriorates when sensor malfunctions
Solution Approach 1:
The invention merges the monitoring of two parameters - discharge power and ozone gas concentration - into a unified detection system. By analyzing the relationship between both parameters simultaneously, the system maintains ease of operation while improving measurement precision through cross-verification of sensor readings against discharge power data.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures reliable detection of ozone gas concentration abnormalities, reducing frequent maintenance needs and maintaining stable ozone gas supply, thus preventing performance decreases in substrate processing.
Implementation Method 1
an ozonizer (22) for generating ozone gas
Implementation Method 2
an ozone sensor (43) for detecting an ozone gas concentration
Data Source
AI summary
A substrate processing apparatus is provided that includes an ozonizer for generating ozone gas and an ozone sensor for detecting an ozone gas concentration. The substrate processing apparatus processes a substrate by using the ozone gas supplied from the ozonizer. The substrate processing apparatus includes a monitor unit for monitoring the ozone gas concentration detected by the ozone sensor and a control unit for detecting an abnormality of the ozone gas concentration based on the monitored ozone gas concentration and the monitored discharge power.