Ozone Removal from Aqueous Streams via UV and CO2 Extraction
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Solution Overview
Problem
Water treatment systems face challenges in effectively removing ozone from aqueous solutions used in semiconductor manufacturing, as dissolved ozone can damage equipment and pose environmental and health risks, and existing methods for ozone removal are inefficient and require special handling.
Innovation Solution
A method involving the removal of dissolved carbon dioxide from the aqueous solution followed by irradiation with ultraviolet light to decompose ozone, with pH adjustment and membrane degasification to optimize ozone destruction, allowing for onsite treatment and potential reuse of the water.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If ultraviolet irradiation is used to remove ozone from aqueous solutions, then ozone concentration is reduced, but dissolved carbon dioxide interferes with the ozone decomposition efficiency
Solution Approach 1:
The patent applies preliminary action by removing dissolved carbon dioxide from the aqueous solution before subjecting it to ultraviolet irradiation for ozone decomposition. This pre-treatment step ensures that the subsequent UV irradiation can efficiently decompose ozone without interference from dissolved CO2, thereby resolving the technical contradiction between reducing ozone concentration and maintaining decomposition efficiency.
Solution Approach 2:
The patent segments the water treatment process into distinct sequential steps: first removing dissolved carbon dioxide, then performing ultraviolet irradiation for ozone decomposition. This segmentation allows each step to optimize for its specific function, improving overall system reliability while effectively reducing ozone concentrations.
2Quantity of substance
If existing ozone removal methods are used, then ozone can be removed, but the methods are inefficient and require special handling
Solution Approach 1:
The patent extracts and removes dissolved carbon dioxide from the aqueous solution as a preliminary step before ozone decomposition. This extraction of interfering substances enables more efficient subsequent ozone removal through ultraviolet irradiation, addressing the contradiction between achieving ozone removal and maintaining high removal efficiency.
Solution Approach 2:
The patent changes the chemical parameters of the aqueous solution by adjusting pH and removing dissolved gases before UV irradiation. These parameter changes create optimal conditions for efficient ozone decomposition, thereby improving productivity while maintaining effective ozone removal.
3Device complexity
If dissolved carbon dioxide is not removed before UV irradiation, then the process is simpler, but ozone decomposition is inhibited
Solution Approach 1:
The patent implements preliminary action by incorporating a carbon dioxide removal step before UV irradiation. Although this adds a preliminary step, it ensures reliable and effective ozone decomposition, resolving the contradiction between process simplicity and decomposition effectiveness.
Solution Approach 2:
The patent uses an intermediary approach by introducing a carbon dioxide removal step as a mediator between the water source and the UV irradiation process. This intermediary step eliminates interfering substances that would inhibit ozone decomposition, thereby ensuring reliable effectiveness while maintaining reasonable process complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces ozone concentrations to safe levels, enabling the reuse of treated water and compliance with environmental regulations, while minimizing equipment damage and handling risks.
Implementation Method 1
irradiating the first effluent with ultraviolet light at a dosage effective to decompose a predetermined amount of the dissolved ozone
Implementation Method 2
controlling pH of the aqueous solution to a value effective to convert the amount of the dissolved carbon dioxide into at least one of carbonate and bicarbonate
Implementation Method 3
contacting the aqueous solution with a membrane degasifier
Data Source
AI summary
A method including directing an aqueous solution having dissolved carbon dioxide and dissolved ozone into a vessel, removing an amount of the dissolved carbon dioxide and irradiating the effluent with ultraviolet light to decompose an amount of the dissolved ozone is disclosed. The method may include removing the dissolved carbon dioxide by controlling pH. The method may include removing the dissolved carbon dioxide by contact with a membrane degasifier. A system including a channel fluidly connectable to a source of an aqueous solution having dissolved carbon dioxide and dissolved ozone, a dissolved carbon dioxide removal subsystem, and a source of ultraviolet irradiation is also disclosed. The dissolved carbon dioxide removal subsystem may include a source of a pH adjuster. The dissolved carbon dioxide removal subsystem may include a membrane degasifier.