Ozone Concentration via Vacuum Desorption and Ambient Adsorption
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Solution Overview
Problem
Existing methods for concentrating ozone gas for semiconductor production require complex cooling and pressurization cycles, leading to energy inefficiency and instability in ozone concentration supply.
Innovation Solution
The ozone-oxygen mixture gas is acted on an adsorbent in a non-cooled state for selective adsorption, with vacuum desorption and alternating adsorption/desorption cycles in parallel columns to efficiently recover high-concentration ozone gas, discarding initial oxygen-rich gas and recovering ozone-rich gas after a constant time period.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the adsorbent is cooled to enhance adsorbing ability, then ozone adsorption efficiency is improved, but cooling cycles and heating cycles are required which increase energy consumption and apparatus complexity
Solution Approach 1:
The invention changes the operating parameters by eliminating the cooling step and using vacuum pressure instead. The adsorbent operates at ambient temperature while vacuum desorption achieves ozone concentration, resolving the contradiction between adsorption efficiency and energy consumption
Solution Approach 2:
The invention extracts the cooling step from the traditional cooling-adsorption-heating-desorption cycle, retaining only the essential vacuum desorption step. This simplifies the process while maintaining effectiveness
2Productivity
If the adsorbent is cooled to enhance adsorbing ability, then ozone adsorption efficiency is improved, but the apparatus is enlarged due to required cooling and heating systems
Solution Approach 1:
The invention removes the cooling and heating systems from the apparatus, retaining only the vacuum pump and basic column structure. This dramatically simplifies the device while maintaining ozone concentration capability
Solution Approach 2:
The invention changes the process parameters to eliminate the need for temperature control systems, using vacuum pressure control instead. This reduces apparatus complexity while preserving functionality
3Manufacturing precision
If vacuum desorption is used to desorb ozone gas from the adsorbent, then high-concentration ozone gas can be obtained, but initial oxygen-rich gas must be discarded reducing productivity
Solution Approach 1:
The invention applies preliminary vacuum evacuation to remove oxygen-rich gas before ozone desorption begins. This preliminary action ensures high purity ozone output while minimizing productivity loss through optimized timing
Solution Approach 2:
The invention implements continuous operation with multiple adsorption columns in alternating cycles, ensuring continuous high-concentration ozone supply while minimizing discarding time through seamless transition between columns
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method maintains a high desorption rate while achieving stable, high-concentration ozone gas supply with reduced energy consumption and simplified apparatus configuration, suitable for semiconductor production and other applications requiring high-purity ozone.
Implementation Method 1
the ozone-oxygen mixture gas is acted on an adsorbent in a non-cooled state to cause ozone gas to be selectively adsorbed by the adsorbent
Implementation Method 2
the adsorbing column is vacuumed when performing an operation of desorbing the ozone gas, thereby desorbing the ozone gas from the adsorbent
Data Source
AI summary
A method of concentrating ozone gas in which, although the apparatus configuration is simple, ozone gas of a predetermined concentration can be efficiently taken out, and an apparatus therefor are provided. In a method of concentrating ozone gas in which an ozone-oxygen mixture gas is acted in an adsorbing column that is filled with an adsorbent, to cause the adsorbent to selectively adsorb the ozone gas, and the selectively adsorbed ozone gas is desorbed, thereby concentrating and purifying the ozone gas, the ozone-oxygen mixture gas is acted on the adsorbent in a non-cooled state to cause the ozone gas to be selectively adsorbed to the adsorbent, the adsorbing column is vacuumed when performing an operation desorbing of the ozone gas, thereby desorbing the ozone gas from the adsorbent, and an initial amount of the leading out of the desorbed ozone gas is not recovered, thereby obtaining high-concentration ozone gas.