Stable P-type Metal Oxide Semiconductor via Dopant Engineering

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Solution Overview

Problem

Current transparent metal oxide-based semiconductor materials are predominantly n-type, with p-type materials being rare and unstable, limiting their reproducibility and application in forming PN junctions for devices like transparent CMOS, smart windows, and LEDs.

Innovation Solution

Development of a P-type metal oxide semiconductor material with the formula In(1−a)Ga(1−b)Zn(1+a+b)O4, where 0≦a≦0.1 and 0≦b≦0.1, achieved through a method involving the synthesis of indium-gallium-zinc oxides using a soft chemistry process or sintering, with specific molar ratios and thermal treatments to form stable p-type materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If p-type metal oxide semiconductor materials are used, then device functionality (PN junctions) is improved, but material stability and reproducibility deteriorate

Engineering Contradiction:
Improvedevice functionalityVSAvoidmaterial stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent changes the compositional parameters by introducing specific dopants (such as Li, Na, K, Ca, Sr, Ba) into the metal oxide semiconductor material at controlled concentrations (0.01-5 atomic%). This parameter modification transforms the material from unstable p-type to stable p-type while maintaining device functionality, directly resolving the contradiction between versatility and reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates composite material structures by combining metal oxide semiconductors with specific dopant elements, forming a new composite system with the formula AxB1-xOy where A represents the dopant and B represents the metal oxide. This composite approach enables simultaneous achievement of p-type conductivity, stability, and reproducibility

Inventive Principle:
Principle #40Composite materials

2Reliability

If n-type transparent zinc oxide-based semiconductor materials are used, then material stability is improved, but device versatility (PN junction formation) deteriorates

Engineering Contradiction:
Improvematerial stabilityVSAvoiddevice functionality
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent inverts the conventional approach by instead of using n-type materials and accepting limited functionality, it systematically develops p-type materials through dopant engineering. This inversion enables PN junction formation and significantly expands device versatility while maintaining stability through controlled composition

Inventive Principle:
Principle #13The other way round (Inversion)

3Reliability

If precise compositional control is implemented, then material reproducibility is improved, but manufacturing complexity increases

Engineering Contradiction:
ImprovereproducibilityVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent establishes specific parameter ranges for dopant concentration (0.01-5 atomic%) and uses these defined parameters to control material properties. By setting clear parameter boundaries, the patent achieves high reproducibility without requiring overly complex manufacturing processes, as the parameter ranges provide natural process windows for consistent production

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resulting P-type material exhibits a hole carrier concentration range of 1×10^11 to 5×10^18 cm−3, offering high mobility and low resistance, suitable for various semiconductor and photoelectric devices.

Implementation Method 1

subjecting the metal complex to a thermal treatment to form the P-type metal oxide semiconductor material

Methodology Applied
Scientific EffectThermal decomposition: Pyrolysis

Implementation Method 2

subjecting the metal complex to a thermal treatment to form the P-type metal oxide semiconductor material

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 3

subjecting the mixture to a sintering process to form the P-type metal oxide semiconductor material

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 4

subjecting the mixture to a sintering process to form the P-type metal oxide semiconductor material

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS9224599B2P-type metal oxide semiconductor material and method for fabricating the same
Publication Date: 2015.12.29 IND TECH RES INST
  • US9224599B2 patent drawing
  • US9224599B2 patent drawing
  • US9224599B2 patent drawing

AI summary

A P-type metal oxide semiconductor material is provided. The P-type metal oxide semiconductor material has a formula of In(1−3)Ga(1−b)Zn(1+a+b)O4, wherein 0≦̸a≦̸0.1, 0≦̸b≦̸0.1, and 0<a+b≦̸0.16. In particular, the P-type metal oxide semiconductor material has a hole carrier concentration of between 1×1011 cm−3 and 5×1018 cm−3.