Semiconductor Package Adhesion Enhancer for Delamination Resistance

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Solution Overview

Problem

Semiconductor packages face challenges in achieving improved adhesion between semiconductor chips and mold layers, leading to reliability and durability issues, as well as reduced yield due to interlayer delamination.

Innovation Solution

Incorporating an adhesion enhancer layer made of acrylic polymer between the oxide layer and the mold layer, which increases the surface area and adhesion strength, preventing interlayer delamination and enhancing the reliability and durability of the semiconductor package.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional semiconductor package structure without adhesion enhancer layer is used, then the device complexity is low and manufacturing is simple, but the adhesion between mold layer and chip structure is insufficient leading to interlayer delamination

Engineering Contradiction:
Improveadhesion strengthVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

An adhesion enhancer layer is introduced as an intermediary between the mold layer and the chip structure. This intermediate layer specifically addresses the adhesion deficiency at the interface without requiring fundamental changes to the overall package architecture, thereby improving reliability while maintaining reasonable structural complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The adhesion enhancer layer is formed as a composite structure comprising multiple functional layers including a base layer, an adhesion promoter layer, and optionally a filler layer. This composite approach enhances adhesion strength through material composition rather than solely relying on geometric complexity.

Inventive Principle:
Principle #40Composite materials

2Reliability

If adhesion enhancer layer is added to improve adhesion, then interlayer delamination is prevented, but the manufacturing process becomes more complex

Engineering Contradiction:
ImprovedurabilityVSAvoidmanufacturing process simplicity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The adhesion enhancer layer is prepared and positioned on the chip structure before the mold layer is applied. This preliminary preparation ensures that the adhesion enhancement function is already in place before final encapsulation, preventing delamination issues that would require complex post-manufacturing repairs.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The adhesion enhancer layer modifies the surface properties and chemical composition at the interface between the mold layer and chip structure. By changing material parameters such as surface energy, roughness, and chemical functionality, the layer improves adhesion without requiring complex manufacturing equipment or processes.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If adhesion enhancer layer is incorporated, then yield is improved by preventing delamination, but the number of process steps increases

Engineering Contradiction:
ImproveyieldVSAvoidnumber of process steps
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The formation of the adhesion enhancer layer is merged with existing manufacturing workflows where possible. For example, the adhesion promoter layer is applied during the same processing sequence as other surface preparation steps, and the filler layer formation is integrated with the molding process, thereby minimizing the increase in total process steps while still improving yield.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adhesion enhancer layer effectively mitigates interlayer delamination, improving the reliability and durability of semiconductor packages and reducing process defects, thereby enhancing yield.

Implementation Method 1

an adhesion enhancer layer on an upper surface of the second chip structure, such that the adhesion enhancer layer is in contact with the mold layer

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

the adhesion enhancer layer includes an acrylic polymer

Methodology Applied
Scientific EffectPolymer adhesion: Adhesive

Data Source

PatentUS20250022764A1Semiconductor package comprising adhesion enhancer layer and method of fabricating the same
Publication Date: 2025.01.16 SAMSUNG ELECTRONICS CO LTD
  • US20250022764A1 patent drawing
  • US20250022764A1 patent drawing
  • US20250022764A1 patent drawing

AI summary

A semiconductor package is provided. The semiconductor package includes a package substrate including bonding pads on a upper surface thereof and external connectors on a lower surface thereof, a first chip structure connected to the package substrate with a bonding wire and disposed on the package substrate, a second chip structure disposed on the package substrate and disposed next to the first chip structure, and a mold layer covering the package substrate, the first chip structure, and the second chip structure, wherein the first chip structure includes a plurality of semiconductor dies that are sequentially stacked, the second chip structure includes a second semiconductor substrate, an oxide layer on the second semiconductor substrate, and an adhesion enhancer layer disposed on the oxide layer and in contact with the mold layer, heights of the first chip structure and the second chip structure are the same.