Package Substrate Air Gaps for Low-Loss High-Speed Interconnects

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Solution Overview

Problem

Current package substrates face challenges in minimizing signal loss and parasitic capacitance at high data rates due to limitations in dielectric and conductor materials, particularly for high-speed signals above 10 GHz, where traditional copper voids and dielectric materials reach their limits in reducing insertion loss and maintaining structural reliability.

Innovation Solution

Incorporation of air gap structures within the package substrate, specifically between and around stripline traces, to reduce the effective dielectric constant and parasitic capacitance, while ensuring structural integrity by exposing these air gaps on the surface and extending them orthogonally into the organic dielectric material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If traditional copper voids and dielectric materials are used, then structural reliability is maintained, but signal loss and parasitic capacitance increase at high data rates

Engineering Contradiction:
Improvesignal lossVSAvoidstructural reliability
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent changes the dielectric constant parameter by introducing air gap structures (effective dielectric constant reduction) around stripline traces. This parameter change reduces parasitic capacitance and signal loss at high frequencies while maintaining structural integrity through the controlled air gap geometry and material selection.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite structure combining organic dielectric material and air gaps in a layered configuration. This composite approach allows the air gaps to reduce parasitic capacitance while the organic dielectric material maintains structural reliability, achieving both goals simultaneously.

Inventive Principle:
Principle #40Composite materials

2Speed

If air gap structures are introduced to reduce parasitic capacitance, then bandwidth increases, but manufacturing complexity increases

Engineering Contradiction:
ImprovebandwidthVSAvoidmanufacturing complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent segments the dielectric material by introducing discrete air gap structures at specific locations around stripline traces. This segmentation reduces parasitic capacitance where needed while maintaining solid dielectric support elsewhere, balancing bandwidth improvement with manufacturing feasibility.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The air gap structures act as intermediary elements between the stripline traces and the organic dielectric material. These intermediaries reduce direct capacitive coupling and parasitic effects while allowing the manufacturing process to proceed through standardized layers and materials.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If air gap structures are used to reduce insertion loss, then signal integrity improves, but dielectric material usage decreases

Engineering Contradiction:
Improvesignal integrityVSAvoiddielectric material
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent applies local quality by introducing air gaps only in specific regions around stripline traces where parasitic capacitance and signal loss are most problematic. This localized approach improves signal integrity where needed while minimizing the overall reduction of dielectric material, maintaining structural support in other areas.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The air gap structures effectively decrease insertion loss by up to 25% and reduce parasitic capacitance, enhancing the bandwidth and reliability of high-speed interconnects without compromising the structural reliability of the package substrate.

Implementation Method 1

reduce the effective dielectric constant and parasitic capacitance

Methodology Applied
Scientific EffectDielectric constant reduction: Dielectric Permittivity

Data Source

PatentUS20240113049A1Package substrate with open air gap structures
Publication Date: 2024.04.04 INTEL CORP
  • US20240113049A1 patent drawing
  • US20240113049A1 patent drawing
  • US20240113049A1 patent drawing

AI summary

Embodiments of a microelectronic assembly that includes: a package substrate, comprising buildup layers of an organic dielectric material and a plurality of layers of conductive traces in the organic dielectric material, the package substrate having a first surface and a second surface opposite the first surface; and a plurality of integrated circuit (IC) dies coupled to the package substrate on the first side. The plurality of layers of conductive traces comprises a pair of stripline traces or microstrips in one of the layers, the stripline traces or microstrips are surrounded by air gap structures in the organic dielectric material, and the air gap structures are exposed on the first surface.