Semiconductor Package Assembly for Large-Die Warpage Control

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Solution Overview

Problem

The semiconductor industry faces challenges in achieving smaller and more efficient packaging techniques for semiconductor devices with advanced functionalities and reduced physical size, particularly in integrating ultra-large dies with minimal warpage and ensuring effective adhesive performance across large areas.

Innovation Solution

A manufacturing method involving a carrier with a release layer, encapsulating material, redistribution layer (RDL) structure, and heat dissipating feature, along with screw assemblies to secure the package, addressing warpage and adhesive performance issues in ultra-large dies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If wafer level integration and packaging techniques are used to reduce physical size, then device footprint is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvedevice footprintVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent divides the large die into multiple smaller dies that are arranged in an array on the carrier substrate. Each die can be processed and handled independently, reducing the complexity of manufacturing while achieving the same functional integration. The segmentation allows standard wafer-level processing techniques to be applied to smaller units that are then combined.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple functional dies are integrated within a single package structure on the carrier substrate, creating a nested configuration where individual dies are embedded within the larger package assembly. This nesting approach enables high integration density while maintaining manageable manufacturing processes through modular assembly.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If ultra-large dies are used to reduce device count, then integration density improves, but warpage increases

Engineering Contradiction:
Improveintegration densityVSAvoidwarpage
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

Instead of using a single ultra-large die, the patent segments the functionality across multiple smaller dies arranged in an array. This segmentation inherently reduces warpage because each individual die experiences less thermal and mechanical stress, preventing the severe warpage that would occur with a single large die while maintaining high integration density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different properties to different regions of the package by using multiple dies with potentially different materials and structures optimized for their specific functions. Each die can be tailored with appropriate thermal expansion coefficients and mechanical properties to minimize local warpage, while the overall array achieves high integration density.

Inventive Principle:
Principle #3Local quality

3Area of stationary object

If adhesive layers are applied over large areas to secure dies, then bonding coverage improves, but adhesive performance deteriorates

Engineering Contradiction:
Improvebonding coverageVSAvoidadhesive performance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent divides the large bonding area into multiple smaller bonding regions, one for each individual die on the carrier substrate. Each die-sized adhesive layer maintains optimal thickness and curing characteristics, ensuring reliable adhesive performance. The segmented approach allows each local bonding area to perform optimally while collectively providing extensive total bonding coverage across the entire package.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20250293114A1Package and Method for Manufacturing the Same
Publication Date: 2025.09.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250293114A1 patent drawing
  • US20250293114A1 patent drawing
  • US20250293114A1 patent drawing

AI summary

A package includes a die having a first side and a second side opposite to each other. The package also includes an encapsulating material surrounding the die. The package further includes a redistribution layer (RDL) structure disposed over the first side of the die and the encapsulating material. The package yet includes a heat dissipating feature disposed over the second side of the die and the encapsulating material. In addition, the package includes a first screw assembly penetrating through the die, the RDL structure and the heat dissipating feature.