IC Package Heat Dissipation on Backside and Sidewalls

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The challenge in the semiconductor industry is to effectively package semiconductor dies with improved heat dissipation structures that accommodate shrinking device sizes and increased integration density, while maintaining manufacturing efficiency and yield.

Innovation Solution

The formation of heat dissipation structures around the package components after singulation, which allows for larger surface area heat dissipation by being formed on the back-side surfaces and sidewalls, thereby improving thermal management in integrated circuit packages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If heat dissipation structures are formed before singulation, then manufacturing process is simpler, but heat dissipation surface area is reduced and shorting risk increases

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidheat dissipation capability
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent divides the manufacturing process into two stages: first forming heat dissipation structures on the wafer-level package component before singulation, then completing the structures after singulation. This segmentation allows the process to benefit from both wafer-level efficiency and individual component optimization, resolving the contradiction between manufacturing simplicity and heat dissipation effectiveness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary formation of heat dissipation structures on the wafer before singulation, establishing a foundation that can be completed individually after cutting. This preliminary action enables efficient batch processing while allowing subsequent customization for each component, balancing manufacturing efficiency with optimal thermal performance.

Inventive Principle:
Principle #10Preliminary action

2Temperature

If heat dissipation structures are formed after singulation, then heat dissipation surface area increases, but manufacturing complexity increases

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The manufacturing process is segmented into wafer-level preliminary formation and individual component completion. This allows the complex steps to be performed on smaller, more manageable individual components after singulation, reducing the complexity burden while maintaining heat dissipation effectiveness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Complex manufacturing steps are performed as preliminary actions on the wafer level where tooling and handling are simpler, then completed individually after singulation. This approach distributes complexity across different stages, making the overall process more manageable while achieving superior heat dissipation.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If device size is reduced for higher integration density, then more components fit in given area, but heat dissipation becomes more challenging

Engineering Contradiction:
Improveintegration densityVSAvoidthermal management difficulty
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The patent extends heat dissipation structures onto the sidewalls of package components, adding a vertical dimension to the heat dissipation surface. This dimensional expansion provides additional thermal management area without increasing the horizontal footprint, enabling effective heat dissipation in densely integrated devices.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent applies heat dissipation structures selectively to specific regions of the package component, including sidewalls and back surfaces, concentrating thermal management resources where heat generation is highest. This localized approach optimizes thermal performance without adding overall device complexity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances heat dissipation capabilities and reduces manufacturing costs by allowing simultaneous processing of more components, while avoiding shorting and increasing yield, thus addressing the need for efficient thermal management in densely packed semiconductor devices.

Implementation Method 1

a heat dissipation layer on the back-side of the package component and on sidewalls of the package component

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

depositing a heat dissipation layer on the support structure, on a back-side of the package component, and on sidewalls of the package component

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS12412802B2Heat dissipation structures for integrated circuit packages and methods of forming the same
Publication Date: 2025.09.09 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12412802B2 patent drawing
  • US12412802B2 patent drawing
  • US12412802B2 patent drawing

AI summary

In an embodiment, a device includes: a package component including an integrated circuit die and conductive connectors connected to the integrated circuit die, the conductive connectors disposed at a front-side of the package component, the integrated circuit die exposed at a back-side of the package component; a heat dissipation layer on the back-side of the package component and on sidewalls of the package component; an adhesive layer on a back-side of the heat dissipation layer, a portion of a sidewall of the heat dissipation layer being free from the adhesive layer; and a package substrate connected to the conductive connectors.