Semiconductor Package EMI Shielding With Vertical Conductive Pillars

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Solution Overview

Problem

Existing semiconductor package shielding methods are costly, inefficient, and require additional space, with issues such as flux creep, delamination, and extrusion problems in attached shields, and difficulties in encapsulating metal shields within the package.

Innovation Solution

A shielding structure using conductive spaced-apart pillar structures, such as conductive wires formed through wire-bonding, attached to a substrate with distal ends not connected to the substrate, and a conformal shielding layer connected to the pillar structures for enhanced EMI shielding, allowing for reduced package size and cost-effective manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a metal can is attached over the component after attachment to substrate, then EMI shielding is achieved, but manufacturing cost increases and reliability decreases due to flux creep, delamination, and extrusion issues

Engineering Contradiction:
ImproveEMI radiationVSAvoidshielding structure reliability
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The conductive pillars are formed on the substrate before the component is attached, integrating the shielding structure into the packaging process itself rather than adding it as a separate post-assembly step. This preliminary formation eliminates the need for subsequent attachment operations that cause reliability issues.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The shielding structure is merged with the substrate by directly forming conductive pillars on the substrate surface. This integration combines the substrate and shielding functions into a single unified structure, eliminating the separate attached shield and its associated reliability problems.

Inventive Principle:
Principle #5Merging (Combining)

2Object-affected harmful factors

If a metal RF shield is directly attached to the semiconductor package substrate, then EMI shielding is achieved, but significant additional space is required on the package substrate

Engineering Contradiction:
ImproveEMI radiationVSAvoidpackage substrate area
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The shielding structure transitions from a planar two-dimensional shield to a three-dimensional vertical pillar structure. The conductive pillars extend vertically from the substrate surface, providing EMI shielding in the vertical dimension while minimizing the horizontal footprint on the substrate.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

Instead of covering the entire substrate with a continuous shield, conductive pillars are strategically positioned only in specific locations where EMI shielding is most needed. This localized approach provides effective shielding while minimizing the overall space required.

Inventive Principle:
Principle #3Local quality

3Object-affected harmful factors

If a metal shield is embedded within the mold compound, then EMI shielding is achieved, but molding process becomes difficult and cost increases

Engineering Contradiction:
ImproveEMI radiationVSAvoidmolding process ease
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The conductive pillars are formed on the substrate before mold compound application, allowing the molding process to flow around pre-formed structures rather than attempting to embed rigid metal shields during molding. This sequence eliminates molding difficulties while maintaining shielding effectiveness.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11855000B2Semiconductor device having EMI shielding structure and related methods
Publication Date: 2023.12.26 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US11855000B2 patent drawing
  • US11855000B2 patent drawing
  • US11855000B2 patent drawing

AI summary

An electronic device structure having a shielding structure includes a substrate with an electronic component electrically connected to the substrate. The shielding structure includes conductive spaced-apart pillar structures that have proximate ends connected to the substrate and distal ends spaced apart from the substrate, and that are laterally spaced apart from the first electronic component. In one embodiment, the conductive pillar structures are conductive wires attached at one end to the substrate with an opposing end extending away from the substrate so that the conductive wires are provided generally perpendicular to the substrate. A package body encapsulates the electronic component and the conductive spaced-apart pillar structures. In one embodiment, the shielding structure further includes a shielding layer disposed adjacent the package body, which is electrically connected to the conductive spaced-apart pillar structures. In one embodiment, the electrical connection is made through the package. In another embodiment, the electrical connection is made through the substrate.