Package Structure Footing Portion Adhesion

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Solution Overview

Problem

The semiconductor industry faces challenges in achieving efficient and reliable testing and packaging of 3D integrated circuit devices due to limitations in current testing methodologies and packaging technologies, which affect yield and cost.

Innovation Solution

The method involves forming a package structure with a die, an encapsulant, a redistribution layer (RDL) structure, and conductive terminals, where test pads are used for verification testing and then removed to avoid solder residue issues, and a seed layer and conductive pillars are used to create connectors with a footing portion for electrical connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If test pads are retained for verification testing, then testing reliability is improved, but solder residue defects occur

Engineering Contradiction:
Improvetesting reliabilityVSAvoidsolder residue defects
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent removes test pads after verification testing is completed. The test pads are extracted from the final package structure, eliminating the source of potential solder residue defects while having served their testing purpose

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Verification testing is performed on the test pads before the final packaging process. This preliminary action allows testing to be completed while the test pads are still present, before they are removed to avoid solder residue issues

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If conventional packaging methods are used, then manufacturing simplicity is maintained, but yield and reliability are reduced

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidpackage reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The seed layer is formed with a footing portion that protrudes from the sidewall of the conductive pillar before the final packaging process. This preliminary formation of the footing portion ensures proper adhesion and wettability for subsequent encapsulant application, improving reliability while maintaining manufacturing flow

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The seed layer is designed with non-uniform geometry, featuring a footing portion that extends beyond the conductive pillar sidewall. This local geometric variation creates enhanced adhesion zones specifically where the encapsulant will contact, improving local bonding quality without affecting the overall manufacturing process

Inventive Principle:
Principle #3Local quality

3Productivity

If smaller feature sizes are used to increase integration density, then component integration is improved, but packaging complexity increases

Engineering Contradiction:
Improveintegration densityVSAvoidpackaging complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The connection structure is segmented into distinct functional zones: the conductive pillar for electrical connection and the footing portion for mechanical adhesion. This segmentation allows each component to be optimized independently for its specific function, simplifying the overall packaging design despite small feature sizes

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the reliability and performance of the package structure by improving wettability and adhesion, reducing defects, and increasing yield while avoiding potential issues from solder residue, thus addressing the limitations of existing testing and packaging methods.

Implementation Method 1

The seed layer includes a footing portion that laterally protrudes from a sidewall of the conductive pillar, thereby improving wettability and adhesion

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS10879224B2Package structure, die and method of manufacturing the same
Publication Date: 2020.12.29 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10879224B2 patent drawing
  • US10879224B2 patent drawing
  • US10879224B2 patent drawing

AI summary

A package structure, a die and method of forming the same are provided. The package structure includes a die, an encapsulant, a RDL structure, and a conductive terminal. The die has a connector. The connector includes a seed layer and a conductive on the seed layer. The seed layer extends beyond a sidewall of the conductive pillar. The encapsulant is aside the die and encapsulates sidewalls of the die. The RDL structure is electrically connected to the die. The conductive terminal is electrically connected to the die through the RDL structure.